Characterization of one-dimensional gratings fabricated by laser-focused atomic deposition

Jie Liu; Xinbin Cheng; Jie Chen; Xingrui Wang; Xiao Deng; Yan Ma; Tongbao Li

doi:10.1117/12.2235906

15 September 2016 Characterization of one-dimensional gratings fabricated by laser-focused atomic deposition

Jie Liu, Xinbin Cheng, Jie Chen, Xingrui Wang, Xiao Deng, Yan Ma, Tongbao Li

Proceedings Volume 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII; 99270K (2016) https://doi.org/10.1117/12.2235906
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

Nanometric lateral standards are essential to nanometrology. Using laser-focused atomic deposition, a one-dimensional (1D) grating has been manufactured. The pitch of the grating is 212.8 nm, which can be traced to the laser wavelength that is accurately locked to the 52Cr atomic resonance transition ⁷S₃ →⁷P₄⁰. In this paper, the uniformity rather than the pitch accuracy of the 1D grating was evaluated using atomic force microscope (AFM). Based on the center-of-gravity method, the average pitch and the nonuniformity of the grating pitch were calculated. The results show that the average pitch of the grating is 213.2 nm which deviates from the design pitch due to the calibration of AFM, and the nonuniformity of the grating is 0.1 nm. The results preliminarily prove that 1D grating fabricated by laser-focused atomic deposition has good uniformity, and has great potential to become nanometric reference material for AFM and scanning electron microscope (SEM) calibration.

Conference Presentation

Citation Download Citation

Jie Liu, Xinbin Cheng, Jie Chen, Xingrui Wang, Xiao Deng, Yan Ma, and Tongbao Li "Characterization of one-dimensional gratings fabricated by laser-focused atomic deposition", Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 99270K (15 September 2016); https://doi.org/10.1117/12.2235906

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