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5 March 2022 UV spectrometer with <1mm3 volume
Marius Grundmann, Max Kneiss, Anna Reinhardt, Chris Sturm, Holger von Wenckstern, Laurenz Thyen, Daniel Splith, Lukas Trefflich
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Proceedings Volume PC12002, Oxide-based Materials and Devices XIII; PC120020Y (2022) https://doi.org/10.1117/12.2619159
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
We have fabricated a novel type of ultracompact spectrometer without dispersive element(s) suitable for the use in smartphones. It comprises a waveguide with a linear photodetector array on top. The photosensitive layer features a steep chemical concentration gradient, fabricated from (MgxZn1-x)O, allowing for spectral detection in the UV. The dimensions of the device make it ultracompact with a volume of less than 1 cubic millimeter.
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Marius Grundmann, Max Kneiss, Anna Reinhardt, Chris Sturm, Holger von Wenckstern, Laurenz Thyen, Daniel Splith, and Lukas Trefflich "UV spectrometer with <1mm3 volume", Proc. SPIE PC12002, Oxide-based Materials and Devices XIII, PC120020Y (5 March 2022); https://doi.org/10.1117/12.2619159
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KEYWORDS
Spectroscopy
Ultraviolet radiation
Waveguides
Photodetectors
Absorption
Ellipsometry
Pulsed laser deposition
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