Simultaneous thickness and surface profiling of blank mask using harmonic phase-iterative method and wavelength-scanning interferometry

Sung Tae Kim; Yangjin Kim

doi:10.1117/12.2620188

20 May 2022 Simultaneous thickness and surface profiling of blank mask using harmonic phase-iterative method and wavelength-scanning interferometry

Sung Tae Kim, Yangjin Kim

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Proceedings Volume PC12137, Optics and Photonics for Advanced Dimensional Metrology II; PC121370D (2022) https://doi.org/10.1117/12.2620188
Event: SPIE Photonics Europe, 2022, Strasbourg, France

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Sung Tae Kim and Yangjin Kim "Simultaneous thickness and surface profiling of blank mask using harmonic phase-iterative method and wavelength-scanning interferometry", Proc. SPIE PC12137, Optics and Photonics for Advanced Dimensional Metrology II, PC121370D (20 May 2022); https://doi.org/10.1117/12.2620188

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