Digital holography for photolithographic micro-nano surface patterning (Conference Presentation)

Alex Berdin; Heikki T. Rekola; Arri Priimägi

doi:10.1117/12.2633308

3 October 2022 Digital holography for photolithographic micro-nano surface patterning (Conference Presentation)

Alex Berdin, Heikki T. Rekola, Arri Priimägi

Proceedings Volume PC12195, Metamaterials, Metadevices, and Metasystems 2022; PC121951D (2022) https://doi.org/10.1117/12.2633308
Event: SPIE Nanoscience + Engineering, 2022, San Diego, California, United States

Abstract

Surface patterning of azobenzene-containing thin films using digital holography microscopy with built-in laser interference setup leads a way to rapid fabrication of diffractive optical elements. The light-induced mass-migration of photochromic materials enables the formation of topographies in a one-step photolithographic process, which is a challenge to existing microfabrication methods. A method for in-situ metrology of surface modifications enables the study and control of the inscribed patterns. As example, we present high-resolution and large-area optical elements that were produced by forming the topographies pixel by pixel according to a digital twin.

Conference Presentation

Citation Download Citation

Alex Berdin, Heikki T. Rekola, and Arri Priimägi "Digital holography for photolithographic micro-nano surface patterning (Conference Presentation)", Proc. SPIE PC12195, Metamaterials, Metadevices, and Metasystems 2022, PC121951D (3 October 2022); https://doi.org/10.1117/12.2633308

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