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Wonyoung Choi, Heechang Ko, Jiwon Kang, Janggun Park, Minwoo Kim, Junhyeong Lee, Hyekeun Oh, "Possible underlayer dependent CD and overlay variation due to different heat absorption with EUV exposure," Proc. SPIE PC12292, International Conference on Extreme Ultraviolet Lithography 2022, PC122920R (31 October 2022); https://doi.org/10.1117/12.2643047