The FabSCIL platform: 200 and 300mm double side full wafer NIL

Marc A. Verschuuren; Rob Voorkamp; Mohammad Ramezani; Gert-Jan Hurxkens; Jeroen Visser

doi:10.1117/12.2658052

30 April 2023 The FabSCIL platform: 200 and 300mm double side full wafer NIL

Marc A. Verschuuren, Rob Voorkamp, Mohammad Ramezani, Gert-Jan Hurxkens, Jeroen Visser

Proceedings Volume PC12497, Novel Patterning Technologies 2023; PC1249709 (2023) https://doi.org/10.1117/12.2658052
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Nanoimprint lithography (NIL) is a technology that can deliver cost effective fabrication of pattern from 10’s of microns, down to sub-micron and nano-patterns (<10nm) on large areas. Substrate Conformal Imprint Lithography (SCIL) solves the limitations of soft-stamp based NIL techniques (resolution, pattern deformation, overlay) and allows low-pressure wafer scale conformal contact and sub-10 nm resolution in direct patterned optically functional inorganic resist systems (RI up to 2.1). Using a novel scatterometry method we verify the reproducible patterning of sub-micron gratings to +/- 1nm. Our latest FabSCIL cluster offers processing of 200 and 300mm wafers, from 300 microns up to 2.5mm thickness, overlay accuracy below 1 micron, even with full automated overlay alignment of patterns directly from the front to the backside of the wafer. In the contribution we will elaborate on the material systems, reproducibility and production solutions.

Conference Presentation

Citation Download Citation

Marc A. Verschuuren, Rob Voorkamp, Mohammad Ramezani, Gert-Jan Hurxkens, and Jeroen Visser "The FabSCIL platform: 200 and 300mm double side full wafer NIL", Proc. SPIE PC12497, Novel Patterning Technologies 2023, PC1249709 (30 April 2023); https://doi.org/10.1117/12.2658052

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available