Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer

Yong Jai Cho; Won Chegal; Junho Choi

doi:10.1117/12.2673375

10 August 2023 Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer

Yong Jai Cho, Won Chegal, Junho Choi

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Proceedings Volume PC12619, Modeling Aspects in Optical Metrology IX; PC126190D (2023) https://doi.org/10.1117/12.2673375
Event: SPIE Optical Metrology, 2023, Munich, Germany

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Yong Jai Cho, Won Chegal, and Junho Choi "Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC126190D (10 August 2023); https://doi.org/10.1117/12.2673375

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