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20 June 2024 Ultrafast Laser Processing of Silicon with GHz Long Burst: Comparison between Infrared and Visible Wavelengths
Marie Fleureau
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Proceedings Volume PC13005, Laser + Photonics for Advanced Manufacturing ; PC1300503 (2024) https://doi.org/10.1117/12.3017531
Event: SPIE Photonics Europe, 2024, Strasbourg, France
Abstract
In this experimental study, a high power femtosecond laser delivering long GHz bursts was use to compare the influence of the wavelength on the quality and the specific ablation rate of selected materials.
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Marie Fleureau "Ultrafast Laser Processing of Silicon with GHz Long Burst: Comparison between Infrared and Visible Wavelengths", Proc. SPIE PC13005, Laser + Photonics for Advanced Manufacturing , PC1300503 (20 June 2024); https://doi.org/10.1117/12.3017531
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KEYWORDS
Infrared radiation
Laser processing
Silicon
Ultrafast lasers
Visible radiation
Second harmonic generation
Laser ablation
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