Universal metrology camera via hardware implementation of artificial intelligence

Arturo Burguete-Lopez; Maksim Makarenko; Qizhou Wang; Andrea Fratalocchi

doi:10.1117/12.3017347

18 June 2024 Universal metrology camera via hardware implementation of artificial intelligence

Arturo Burguete-Lopez, Maksim Makarenko, Qizhou Wang, Andrea Fratalocchi

Proceedings Volume PC13017, Machine Learning in Photonics; PC1301706 (2024) https://doi.org/10.1117/12.3017347
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

We present a framework for optical metrology in which, through the hardware implementation of artificial intelligence via metasurfaces, a conventional camera becomes a metrology system capable of retrieving observables from a light beam. We show the experimental realization of a prototype of this system and the results of its use for measuring the properties of thin films.

Conference Presentation

Citation Download Citation

Arturo Burguete-Lopez, Maksim Makarenko, Qizhou Wang, and Andrea Fratalocchi "Universal metrology camera via hardware implementation of artificial intelligence", Proc. SPIE PC13017, Machine Learning in Photonics, PC1301706 (18 June 2024); https://doi.org/10.1117/12.3017347

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