CMOS nanophotonics

Mohamed El Kabbash

doi:10.1117/12.3026090

3 October 2024 CMOS nanophotonics

Mohamed El Kabbash

Author Affiliations +

Proceedings Volume PC13110, Active Photonic Platforms (APP) 2024; PC131101A (2024) https://doi.org/10.1117/12.3026090
Event: Nanoscience + Engineering, 2024, San Diego, California, United States

Abstract

We proposed recently that the building blocks of metal optics (encompassing plasmonics, metasurfaces, and metamaterials) can be fabricated in existing CMOS foundry processes by repurposing the back-end-of-the-line (BEOL) of the CMOS chip in. We demonstrated a metal-optic liquid crystal modulator using a chip that is fully fabricated in the conventional 65-nm CMOS process. In this talk, we provide an in-depth presentation on the design constrains and post-processing steps required to convert CMOS chips to nano-photonic devices. We will also present recent developments and prospects of CMOS meta-optics and optoelectronics.

Conference Presentation

Citation Download Citation

Mohamed El Kabbash "CMOS nanophotonics", Proc. SPIE PC13110, Active Photonic Platforms (APP) 2024, PC131101A (3 October 2024); https://doi.org/10.1117/12.3026090

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