4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging

Steven A. Cornelissen; Paul A. Bierden; Thomas G. Bifano; Charlie Lam V. Lam

doi:10.1117/1.3158067

1 July 2009 4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging

Steven A. Cornelissen, Paul A. Bierden, Thomas G. Bifano, Charlie Lam V. Lam

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 3, 031308 (July 2009). https://doi.org/10.1117/1.3158067

Abstract

We present the progress in the development of a 4096-element microelectromechanical systems (MEMS) deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4 µm of stroke, a surface finish of <10 nm rms, a fill factor of 99.5%, and a bandwidth of >5 kHz. The packaging and high-speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Steven A. Cornelissen, Paul A. Bierden, Thomas G. Bifano, and Charlie Lam V. Lam "4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(3), 031308 (1 July 2009). https://doi.org/10.1117/1.3158067

Published: 1 July 2009

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