Dual-photoresist complementary lithography technique for the formation of submicron patterns on sapphire substrates

Chun-Ming Chang; Shih-Feng Tseng; Chao-Te Lee; Wen-Tse Hsiao; J. Andrew Yeh; Donyau Chiang

doi:10.1117/1.JMM.13.3.033004

22 July 2014 Dual-photoresist complementary lithography technique for the formation of submicron patterns on sapphire substrates

Chun-Ming Chang, Shih-Feng Tseng, Chao-Te Lee, Wen-Tse Hsiao, J. Andrew Yeh, Donyau Chiang

Author Affiliations +

Funded by: Taiwan National Science Council

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 3, 033004 (July 2014). https://doi.org/10.1117/1.JMM.13.3.033004

Abstract

Dual-photoresist complementary lithography technique consisting of inorganic oxide photoresist and organic photoresist is applied to produce the submicron pit array patterns on a sapphire surface. The oxide photoresist is patterned by direct laser writing, and the developed pit size decreases to a smaller value than the laser spot size due to the thermal lithography. The oxide photoresist possesses strong etching resistance against oxygen plasma but shows no resistance against chlorine plasma. During the ion-coupled-plasma reactive-ion-etching process, chlorine plasma is a necessary component to etch the sapphire. Moreover, the characteristics of organic resist are opposite those of oxide photoresist and possess moderate resistance against chlorine plasma but no resistance against oxygen plasma. The thermal and developing characteristics of oxide photoresist are reported in this study. The dependence of laser power on the developed mark sizes and morphologies is examined by atomic force microscopy. The temperature distribution on the photoresist structure during the laser writing is simulated, and the thermal lithography concept is introduced to explain the effect of power on the developed oxide mark width. Images of patterned pit array on a commercial 4-inch-diameter sapphire substrate are also shown.

Citation Download Citation

Chun-Ming Chang, Shih-Feng Tseng, Chao-Te Lee, Wen-Tse Hsiao, J. Andrew Yeh, and Donyau Chiang "Dual-photoresist complementary lithography technique for the formation of submicron patterns on sapphire substrates," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(3), 033004 (22 July 2014). https://doi.org/10.1117/1.JMM.13.3.033004

Published: 22 July 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE