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Tight confinement of light in photonic cavities helps realize high optical intensity with strong field gradients. We designed a nanoscale resonator device based on a one-dimensional photonic crystal slot cavity. Our design allows for highly localized optical modes with theoretically predicted quality factors (Q factors) in excess of 106 . The design was implemented experimentally both in a high-contrast refractive index system (silicon), as well as in medium refractive-index-contrast devices made from aluminum nitride. We achieved an extinction ratio of 21 dB in critically coupled resonators using an on-chip readout platform with loaded Q as high as 33,000. Our approach holds promise for ultrasmall optomechanical resonators for high-frequency operation and sensing applications.
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Wolfram H. P. Pernice, Chi Xiong, Hong Tang, "Photonic crystal dumbbell resonators in silicon and aluminum nitride integrated optical circuits," J. Nanophoton. 7(1) 073095 (16 April 2013) https://doi.org/10.1117/1.JNP.7.073095