X-Ray Lithography Applied To The Fabrication Of One Micrometer N-Channel Metal Oxide Semiconductor Circuits

E. N. Fuls

doi:10.1117/12.7973082

1 April 1983 X-Ray Lithography Applied To The Fabrication Of One Micrometer N-Channel Metal Oxide Semiconductor Circuits

E. N. Fuls

Author Affiliations +

Optical Engineering, Vol. 22, Issue 2, 222199 (April 1983). https://doi.org/10.1117/12.7973082

Abstract

A full-field x-ray exposure system based on a 4 kW stationary palladium source emitting the 4.37 A La line has been developed and evaluated in the fabrication of silicon integrated circuits. It has been used successfully in the patterning of 1 um design rule high performance n-channel metal oxide semi-conductor (NMOS) circuits of various complexities from ring oscillators to large scale custom logic and memory devices. A shadow mask consisting of a 6µm boron nitride membrane and 0.7 pm gold-tantalum features is used to transfer patterns into a chlorine-based x-ray resist sensitive to the 4.37 A radiation. Pattern transfer to the silicon surface is faithfully reproduced through the use of a trilevel structure and anisotropic reactive ion etching. Alignment of various levels is accomplished optically through the use of a bifocal, split-field microscope at high magnification and the use of dark-field edge sensing for improved contrast. Linewidth control and registration data are presented for various NMOS circuit patterns.

Citation Download Citation

E. N. Fuls "X-Ray Lithography Applied To The Fabrication Of One Micrometer N-Channel Metal Oxide Semiconductor Circuits," Optical Engineering 22(2), 222199 (1 April 1983). https://doi.org/10.1117/12.7973082

Published: 1 April 1983

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available