Large-aperture high-accuracy phase-shifting digital flat interferometer

Jinbang Chen; Dezhen Song; Rihong Zhu; Qingyun Wang; Lei Chen; Daojiong Chen

doi:10.1117/1.600627

1 July 1996 Large-aperture high-accuracy phase-shifting digital flat interferometer

Jinbang Chen, Dezhen Song, Rihong Zhu, Qingyun Wang, Lei Chen, Daojiong Chen

Optical Engineering, Vol. 35, Issue 7, (July 1996). https://doi.org/10.1117/1.600627

A large-aperture high-accuracy phase-shifting digital flat interferometer that is a combination of optics, mechanics, electricity, and algorithm is described. The aperture size is 250 mm and a liquid surface is used as an absolute flat to eliminate system error. The accuracy is better than ?/50 (?50.6328 µm, peak-to-valley value). The tested aperture can be enlarged to 500 mm. This interferometer has been used as an optical flat standard instrument for China. The optical interferometer, phase shifter, and calibration of precision are described.

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Jinbang Chen, Dezhen Song, Rihong Zhu, Qingyun Wang, Lei Chen, and Daojiong Chen "Large-aperture high-accuracy phase-shifting digital flat interferometer," Optical Engineering 35(7), (1 July 1996). https://doi.org/10.1117/1.600627

Published: 1 July 1996

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