Automatic measurement of surface height with the interferoscope

Torgny E. Carlsson; Nils H. Abramson; Kai H. Fischer

doi:10.1117/1.600977

1 October 1996 Automatic measurement of surface height with the interferoscope

Torgny E. Carlsson, Nils H. Abramson, Kai H. Fischer

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Optical Engineering, Vol. 35, Issue 10, (October 1996). https://doi.org/10.1117/1.600977

Using a grazing incidence interferometer, the interferoscope, an automatic absolute measurement of a test object surface height can be made by counting the number of interference fringes when varying the surface incident angle. This is accomplished by combining the interferoscope with a computer-controlled stepping motor along with an image processing system. By transforming the equations describing the interferoscope, the sought depth can be regarded as a ‘‘frequency,’’ which can be attained using Fourier transforms or other frequency evaluation algorithms.

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Torgny E. Carlsson, Nils H. Abramson, and Kai H. Fischer "Automatic measurement of surface height with the interferoscope," Optical Engineering 35(10), (1 October 1996). https://doi.org/10.1117/1.600977

Published: 1 October 1996

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