Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm

Joanna Schmit; Parameswaran Hariharan

doi:10.1117/1.2387882

1 November 2006 Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm

Joanna Schmit, Parameswaran Hariharan

Author Affiliations +

Optical Engineering, Vol. 45, Issue 11, 115602 (November 2006). https://doi.org/10.1117/1.2387882

Abstract

We show how an eight-step algorithm with a high tolerance for phase-shift miscalibration can be used with a conventional Mirau interferometer, with only minor modifications to the software, for two-wavelength interferometric profilometry of surfaces exhibiting steps and discontinuities.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Joanna Schmit and Parameswaran Hariharan "Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm," Optical Engineering 45(11), 115602 (1 November 2006). https://doi.org/10.1117/1.2387882

Published: 1 November 2006

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