Submicroradian laser beam angular scan precision measurement by interference method

Jianfeng Sun; Liren Liu; Anhu Li; Deyan Xu

doi:10.1117/1.3183943

1 July 2009 Submicroradian laser beam angular scan precision measurement by interference method

Jianfeng Sun, Liren Liu, Anhu Li, Deyan Xu

Author Affiliations +

Optical Engineering, Vol. 48, Issue 7, 073607 (July 2009). https://doi.org/10.1117/1.3183943

Abstract

Laser beam angular scan accuracy measurement plays an important role in many fields. A sub-microradian laser beam scan precision measurement method that utilizes the wavefront interference method with a Zygo interferometer is proposed. The experimental results show that the measurement accuracy is approximately 0.04 μrad, and the new method is very effective and feasible.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jianfeng Sun, Liren Liu, Anhu Li, and Deyan Xu "Submicroradian laser beam angular scan precision measurement by interference method," Optical Engineering 48(7), 073607 (1 July 2009). https://doi.org/10.1117/1.3183943

Published: 1 July 2009

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