Design and fabrication of silicon-based linear polarizer with multilayer nanogratings operating in infrared region

Yu Lin; Jingpei Hu; Bing Cao; Miao Wang; Chinhua Wang

doi:10.1117/1.OE.56.1.017111

26 January 2017 Design and fabrication of silicon-based linear polarizer with multilayer nanogratings operating in infrared region

Yu Lin, Jingpei Hu, Bing Cao, Miao Wang, Chinhua Wang

Author Affiliations +

Funded by: Natural Science Foundation of China, National High Technology Research Development Program of China

Optical Engineering, Vol. 56, Issue 1, 017111 (January 2017). https://doi.org/10.1117/1.OE.56.1.017111

Abstract

We have proposed and experimentally demonstrated a silicon-based linear polarizer with multilayer nanogratings working in 3 to 5 μm of an infrared region. A dielectric grating is first fabricated in a low-refractive index thin layer on a Si-substrate and then double-layer metallic gratings are formed by evaporating a metallic film onto the dielectric grating. With the designed structure of multilayer nanogratings coupled with a low-refractive-index dielectric layer on the high-refractive index silicon substrate, both high transverse magnetic transmission (TMT) and high extinction ratio (ER) can be effectively achieved across 3- to 5-μm range in the infrared band without the complicated metallic ion etching process that is required in conventional nanowire grids. An ER of 40 dB and TMT of averagely higher than 80% were obtained experimentally from a linear polarizer with a multilayer grating of 280-nm period. The Si-based multilayer grating structure shows possibilities of implementing polarization in a fashion of relatively easy-fabrication, semiconductor process compatible, and high performance.

Citation Download Citation

Yu Lin, Jingpei Hu, Bing Cao, Miao Wang, and Chinhua Wang "Design and fabrication of silicon-based linear polarizer with multilayer nanogratings operating in infrared region," Optical Engineering 56(1), 017111 (26 January 2017). https://doi.org/10.1117/1.OE.56.1.017111

Received: 30 October 2016; Accepted: 4 January 2017; Published: 26 January 2017

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