18 October 2019 Design and analysis of a high accuracy bidirectional thermal deformable mirror
Lei Ni, Dengqiang Song
Author Affiliations +
Abstract

To realize an efficient, low-cost, and two-way heat-driven deformable mirror, a deformable mirror-integrated structure using a thermoelectric cooler is proposed. The bidirectional heat-driven stroke, thermal field distribution, and deformation were obtained by finite element analysis. At the same time, the error correction effect of the deformed mirror is verified by experiments: the mirror peak value is corrected from 7.087 to 0.386  μm and the root-mean-square value is corrected from 1.347 to 0.081  μm. For four special aberrations—convex divergence, concave divergence, 45-deg astigmatism, and 90-deg astigmatism—the correction error can be controlled below 5%. More importantly, the cost of the deformed mirror structure designed is under 10,000 yuan; the cost is greatly reduced compared to other deformed mirror structures.

© 2019 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2019/$28.00 © 2019 SPIE
Lei Ni and Dengqiang Song "Design and analysis of a high accuracy bidirectional thermal deformable mirror," Optical Engineering 58(10), 105102 (18 October 2019). https://doi.org/10.1117/1.OE.58.10.105102
Received: 8 July 2019; Accepted: 26 September 2019; Published: 18 October 2019
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Cited by 1 scholarly publication.
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KEYWORDS
Mirrors

Deformable mirrors

Mirror structures

Copper

Photovoltaics

Finite element methods

Thermoelectric materials

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