8 June 2020 Fabry–Perot acoustic sensor based on a thin gold diaphragm
Qiangqiang Huang, Shuo Deng, Min Li, Xiaoyan Wen, Haifei Lu
Author Affiliations +
Abstract

An extrinsic Fabry–Perot interferometer (EFPI) acoustic sensor based on a gold diaphragm with an about 100 nm thickness has been proposed and demonstrated. The Fabry–Perot (F-P) cavity consists of a gold diaphragm and a fiber endface. Experimental results illustrate a static pressure sensitivity of about 19.5  nm  /  kPa in the range from 0 to 100 kPa with linearity of about 0.99. Meanwhile, the flat acoustic frequency response of about 35.0  mV  /  Pa between 0.2 and 2.0 kHz is achieved, and the largest acoustic pressure sensitivity is about 80.6  mV  /  Pa at 2.6 kHz. The noise-limited minimum detectable pressure is 1.3  mPa  /  Hz1/2 @ 2.6 kHz. The proposed EFPI acoustic sensor may have potential application in security and surveillance systems.

© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2020/$28.00 © 2020 SPIE
Qiangqiang Huang, Shuo Deng, Min Li, Xiaoyan Wen, and Haifei Lu "Fabry–Perot acoustic sensor based on a thin gold diaphragm," Optical Engineering 59(6), 064105 (8 June 2020). https://doi.org/10.1117/1.OE.59.6.064105
Received: 25 February 2020; Accepted: 27 May 2020; Published: 8 June 2020
Lens.org Logo
CITATIONS
Cited by 14 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sensors

Gold

Acoustics

Optical engineering

Zinc oxide

Interferometers

Reflection

RELATED CONTENT

Humidity sensor base on the ZnO nanorods and fiber modal...
Proceedings of SPIE (October 25 2016)
A forty-year history of fiber optic smart structures
Proceedings of SPIE (April 04 2017)
Fiber-Optic Sensors For Geophysical Applications
Proceedings of SPIE (February 01 1989)
An Optical Fiber Hot-Wire Anemometer
Proceedings of SPIE (February 13 1990)

Back to Top