31 August 2021 Self-assembly of wedge-shaped PDMS substrate for the fabrication of variable line-space gratings
Haitao Li, Kangni Wang, Linyong Qian
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Abstract

A low-cost and high-efficiency method for fabricating variable line-space gratings is reported. Specifically, oxygen plasma was used to process the stretched wedge polydimethylsiloxane substrate. After slowly releasing the stress, a gradient grating with a continuous change in line spacing was formed via self-assembly. The period of the self-assembly grating was 2.96 to 3.25  μm, from thick to thin, when the sample was stretched transversely. In longitudinal stretching, the period was 3.71 to 5.20  μm from thick to thin. The period variation range of the gratings obtained by the two types of stretching was 15% and 45%, respectively. Diffraction tests of the two samples showed that the diffraction spots were evident. The diffraction angles varied in the range of 11.31 deg to 12.41 deg and 7.12 deg to 9.93 deg. The gratings prepared using this method can compensate for the shortcomings of the traditional process and have a wide range of application prospects.

© 2021 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2021/$28.00 © 2021 SPIE
Haitao Li, Kangni Wang, and Linyong Qian "Self-assembly of wedge-shaped PDMS substrate for the fabrication of variable line-space gratings," Optical Engineering 60(8), 085110 (31 August 2021). https://doi.org/10.1117/1.OE.60.8.085110
Received: 4 June 2021; Accepted: 18 August 2021; Published: 31 August 2021
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Diffraction

Diffraction gratings

Etching

Silicon films

Oxygen

Optical engineering

Oxides

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