20 February 2024 Large dynamic range Shack–Hartmann wavefront sensor based on holographic multipoint generation and pattern correlation
Simon Hartlieb, Zhen Wang, Andrea Rüdinger, Tobias Haist, Stephan Reichelt
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Abstract

A principle of a wavefront measurement sensor based on computer generated holograms is presented. In contrast to conventional Shack–Hartmann sensors, the wavefront is not sampled using a lens array but an array of subholograms. Each subhologram generates a multipoint pattern with unique point distribution on the camera fulfilling two tasks. First, by calculating the wavefront reconstruction for each of the multiple points, averaging improves the accuracy compared to a single point evaluation. Second, the dynamic range of the proposed sensor is enhanced due to the unique shape of each pattern. The assignment between pattern and subhologram can be achieved even for overlapping patterns by the use of digital image correlation. First results show that the averaged standard deviation is 12.5 nm, which corresponds to less than λ/50, and the maximum angle of the incident wavefront is 8.7 deg. The sensitivity related to the aperture size is better than λ/126.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Simon Hartlieb, Zhen Wang, Andrea Rüdinger, Tobias Haist, and Stephan Reichelt "Large dynamic range Shack–Hartmann wavefront sensor based on holographic multipoint generation and pattern correlation," Optical Engineering 63(2), 024107 (20 February 2024). https://doi.org/10.1117/1.OE.63.2.024107
Received: 8 August 2023; Accepted: 16 January 2024; Published: 20 February 2024
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KEYWORDS
Wavefronts

Sensors

Wavefront reconstruction

Wavefront sensors

Diffraction

Calibration

Image sensors

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