Dr. Akira Takada Profile

Dr. Akira Takada

at Topcon Corp Eye Care Advanced Development Sec.

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 13 March 2024 Poster + Paper

Coherence property measurement of MEMS-VCSELs for SS-OCT based on the depth dependence of the noise floor

Maimi Shimura, Akira Takada, Makoto Fujino

Proceedings Volume 12830, 1283006 (2024) https://doi.org/10.1117/12.2691995

KEYWORDS: Light sources, Vertical cavity surface emitting lasers, Optical coherence tomography, Interference (communication), Reflection, Sampling rates, Optical filtering, Free space optics, Fiber Bragg gratings, Data acquisition

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SPIE Journal Paper | 4 March 2016 Open Access

Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns

Masato Shibuya, Akira Takada, Toshiharu Nakashima

JM3, Vol. 15, Issue 02, 021206, (March 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.2.021206

KEYWORDS: Projection systems, Image processing, Fourier transforms, Optical spheres, Diffraction, Photomasks, Wave propagation, Optical lithography, Lithography, Radio propagation

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Proceedings Article | 18 March 2015 Paper

Comparing the experimental resist image with aerial image intensity in high-NA projection lense

Masato Shibuya, Akira Takada, Toshiharu Nakashima

Proceedings Volume 9426, 94261C (2015) https://doi.org/10.1117/12.2085454

KEYWORDS: Optical spheres, Diffraction, Photomasks, Optical lithography, Transmittance, Projection systems, Wave propagation, Semiconducting wafers, Lithography, Geometrical optics

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Proceedings Article | 4 March 2015 Paper

Phase stabilization of an actively mode-locked ring laser

Akira Takada, Makoto Saika, Shigenori Nagano

Proceedings Volume 9344, 93442E (2015) https://doi.org/10.1117/12.2077025

KEYWORDS: Mode locking, Optical coherence tomography, Fiber Bragg gratings, Modulation, Laser stabilization, Phase measurement, Phase shift keying, Signal detection, Point spread functions, Laser applications

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Proceedings Article | 7 March 2014 Paper

Effect of linewidth enhancement factor in actively mode-locked ring laser

Akira Takada, Makoto Saika, Shigenori Nagano

Proceedings Volume 8961, 896135 (2014) https://doi.org/10.1117/12.2036248

KEYWORDS: Modulation, Mode locking, Scanning probe microscopy, Fiber Bragg gratings, Reflectivity, Optical coherence tomography, Laser resonators, Semiconductor optical amplifiers, Semiconductor lasers, Tunable lasers

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Proceedings Article | 23 March 2011 Paper

Evaluating the performance of DP and EUVL by using analytical equations for resolution of optical lithography with considering required DOF

Masato Shibuya, Kouhei Nogami, Akira Takada, Suezou Nakadate

Proceedings Volume 7973, 79732Y (2011) https://doi.org/10.1117/12.879041

KEYWORDS: Phase shifts, Extreme ultraviolet lithography, Photomasks, Optical lithography, Lithography, Light, Resolution enhancement technologies, Double patterning technology, Optical resolution, Polarization

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SPIE Journal Paper | 1 July 2010

Theoretical investigation of the meaning of odd-order aspherical surface and numerical confirmation of effectiveness in rotational-symmetric but off-axis optics

Masato Shibuya, Kazuhisa Maehara, Yoshihito Ishikawa, Akira Takada, Kei Kobayashi, Mitsunori Toyoda, Masanori Tanikawa, Suezou Nakadate

OE, Vol. 49, Issue 07, 073003, (July 2010) https://doi.org/10.1117/12.10.1117/1.3461991

KEYWORDS: Extreme ultraviolet lithography, Lens design, Optical engineering, Projection systems, Optical design, Monochromatic aberrations, Zernike polynomials, Cameras, Mathematics, Semiconducting wafers

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Proceedings Article | 2 April 2010 Paper

Mask defect inspection by detecting polarization variations

Akira Takada, Masato Shibuya

Proceedings Volume 7638, 76382Y (2010) https://doi.org/10.1117/12.846008

KEYWORDS: Polarization, Inspection, Defect detection, Photomasks, Image transmission, Image sensors, Defect inspection, Lithographic illumination, Image enhancement, Sensors

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SPIE Journal Paper | 1 February 2010

Incoming inclination factor for scalar imaging theory

Akira Takada, Masato Shibuya, Takahiro Saitoh, Akira Nishikata, Kazuhisa Maehara, Suezou Nakadate

OE, Vol. 49, Issue 02, 023202, (February 2010) https://doi.org/10.1117/12.10.1117/1.3319813

KEYWORDS: Diffraction, Point spread functions, Spherical lenses, Wavelets, Optical engineering, Geometrical optics, Optical spheres, Signal attenuation, Wave propagation, Solids

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SPIE Journal Paper | 1 October 2008

Coherence control of illumination optics in mask inspection systems

Akira Takada, Toru Tojo, Masato Shibuya

JM3, Vol. 7, Issue 04, 043010, (October 2008) https://doi.org/10.1117/12.10.1117/1.3013458

KEYWORDS: Inspection, Light, Spatial coherence, Optical inspection, Light sources, Photomasks, Imaging systems, Optical components, Transmittance, Neptunium

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Proceedings Article | 24 March 2008 Paper

Verification of optics for the die-to-wafer-like image mask inspection

Akira Takada, Toru Tojo, Masato Shibuya

Proceedings Volume 6922, 692229 (2008) https://doi.org/10.1117/12.772359

KEYWORDS: Inspection, Photomasks, Semiconducting wafers, Optical inspection, Wafer-level optics, Diffraction, Scanners, Computer aided design, Resolution enhancement technologies, Defect inspection

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Proceedings Article | 5 April 2007 Paper

Image quality improvement in inspection systems using double integrator illumination

Akira Takada, Hitoshi Suzuki, Toru Tojo, Masato Shibuya

Proceedings Volume 6518, 65184B (2007) https://doi.org/10.1117/12.711286

KEYWORDS: Inspection, Integrated optics, Photomasks, Image sensors, Defect inspection, Image quality, Imaging systems, Image processing, Lenses, Image acquisition

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Proceedings Article | 31 August 2006 Paper

Proposing the inclination factor which satisfies the reciprocity theorem in scalar imaging theory and confirming the validity by numerical calculations

Masato Shibuya, Akira Nishikata, Akira Takada, Suezou Nakadate

Proceedings Volume 6288, 62880D (2006) https://doi.org/10.1117/12.680207

KEYWORDS: Diffraction, Point spread functions, Optical spheres, Spherical lenses, Micro optics, Optical design, Polarization, Wavefronts, Signal attenuation, Imaging systems

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Proceedings Article | 24 March 2006 Paper

Real-time aerial-images-based mask inspection, die-to-wafer image inspection

Akira Takada, Toru Tojo

Proceedings Volume 6152, 615245 (2006) https://doi.org/10.1117/12.655978

KEYWORDS: Inspection, Photomasks, Semiconducting wafers, Diffraction, Defect detection, Computer aided design, Optical proximity correction, Binary data, Wafer inspection, Chromium

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Proceedings Article | 23 March 2006 Paper

Novel low thermal expansion material for EUV application

Mitsuhiro Kawata, Akira Takada, Hideaki Hayashi, Naoki Sugimoto, Shinya Kikugawa

Proceedings Volume 6151, 61511A (2006) https://doi.org/10.1117/12.655931

KEYWORDS: Glasses, Silica, Tin, Silicon, Extreme ultraviolet, Quartz, Photomasks, Chlorine, Extreme ultraviolet lithography, Chemistry

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Showing 5 of 15 publications

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