Dr. Andreas Wagener Profile

Dr. Andreas Wagener

at Univ Siegen

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 20 December 2006 Paper

Optimization of MEMS fabrication process design by virtual experiments

T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, R. Brück

Proceedings Volume 6415, 64150R (2006) https://doi.org/10.1117/12.695427

KEYWORDS: Microelectromechanical systems, Materials processing, TCAD, 3D modeling, Manufacturing, Device simulation, Microelectronics, Prototyping, Process modeling, Photomasks

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Proceedings Article | 21 April 2006 Paper

Management and verification for MEMS fabrication processes

T. Schmidt, D. Ortloff, K. Hahn, A. Wagener, J. Popp, R. Brück

Proceedings Volume 6186, 61860S (2006) https://doi.org/10.1117/12.661919

KEYWORDS: Microelectromechanical systems, Materials processing, Fabrication, Process modeling, Manufacturing, Silicon, Device simulation, Environmental management, Process engineering, Photomasks

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Proceedings Article | 23 January 2006 Paper

Process design and tracking support for MEMS

A. Wagener, T. Schmidt, J. Popp, K. Hahn, R. Brück, D. Ortloff

Proceedings Volume 6109, 610908 (2006) https://doi.org/10.1117/12.644486

KEYWORDS: Microelectromechanical systems, Data storage, Data processing, Databases, Semiconducting wafers, Structural design, Process modeling, Environmental management, Prototyping, Interfaces

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Proceedings Article | 5 January 2006 Paper

Knowledge-based process simulation and design system for MEMS

J. Popp, T. Schmidt, A. Wagener, K. Hahn, R. Brück, A. Hössinger

Proceedings Volume 6035, 603512 (2006) https://doi.org/10.1117/12.638483

KEYWORDS: Microelectromechanical systems, Photomasks, Data processing, 3D modeling, Process modeling, Structural design, Environmental management, Device simulation, TCAD, Computer simulations

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Proceedings Article | 1 July 2005 Paper

CAD tool environment for MEMS process design support

T. Schmidt, A. Wagener, J. Popp, K. Hahn, R. Bruck

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608517

KEYWORDS: Computer aided design, Microelectromechanical systems, Etching, Data processing, Materials processing, Databases, Interfaces, Process engineering, Data modeling, Polymers

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Proceedings Article | 28 February 2005 Paper

Technology interfaces to microsystem and nanoelectronic processes

Thilo Schmidt, Andreas Wagener, Jens Popp, Kai Hahn

Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.581830

KEYWORDS: Computer aided design, Data processing, Etching, Microelectromechanical systems, Databases, Interfaces, Nanoelectronics, Java, Computer architecture, Microsystems

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Proceedings Article | 22 January 2005 Paper

MEMS fabrication process management environment

Jens Popp, Thilo Schmidt, Andreas Wagener, Kai Hahn

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.590276

KEYWORDS: Data processing, Microelectromechanical systems, Data modeling, Etching, Environmental management, Databases, Interfaces, Computer aided design, Java, Device simulation

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Proceedings Article | 30 March 2004 Paper

Process management and design for MEMS and microelectronics technologies

Kai Hahn, Jens Popp, Andreas Wagener

Proceedings Volume 5274, (2004) https://doi.org/10.1117/12.522882

KEYWORDS: Computer aided design, Microelectromechanical systems, Microelectronics, Databases, Process modeling, Data processing, Etching, Photomasks, Interfaces, 3D modeling

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Proceedings Article | 30 December 2003 Paper

Process design environment for microfabrication technologies

Andreas Wagener, Jens Popp, Kai Hahn

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524368

KEYWORDS: Microelectromechanical systems, Analog electronics, Databases, Data processing, Data modeling, Data storage, Java, Photomasks, Interfaces, Finite element methods

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Showing 5 of 9 publications

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