Dr. Artem S. Trifonov
at MV Lomonosov Moscow State Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 March 2019 Paper
G. Presnova, I. Tcinyaykin, I. Bozhev, M. Yu. Rubtsova, V. Shorokhov, A. Trifonov, M. Ulyashova, V. Krupenin, D. Presnov
Proceedings Volume 11022, 110220Z (2019) https://doi.org/10.1117/12.2522461
KEYWORDS: Silicon, Field effect transistors, Nanowires, Biosensors, Cancer, Reactive ion etching, Transistors, Electron beam lithography, Sensors, Semiconducting wafers

Proceedings Article | 15 March 2019 Paper
D. Presnov, A. Dorofeev, I. Bozhev, A. Trifonov, S. Kafanov, Yu. Pashkin, V. Krupenin
Proceedings Volume 11022, 110220V (2019) https://doi.org/10.1117/12.2521034
KEYWORDS: Silicon, Resonators, Nanowires, Photomasks, Nanoelectromechanical systems, Nanolithography, Sensors, Silicon films

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