Fabry-Perot displacement interferometry (FPI) offers high sensitivity and resolution with direct traceability to optical
frequency standards. FPI can provide means for demanding calibration tasks in precision engineering and high-tech
systems. We report on our investigation of the measurement methodology applied to highest precision capacitive
displacement sensors. We use a dedicated metrological FPI instrumentation that provides an actuated reference target
with a relatively large traceable displacement stroke. The envisaged sub-nanometer measurement uncertainty seems very
challenging under practical ambient atmospheric conditions and with the necessary sensor mounting components. In
anticipation of these limitations, we propose a new FPI instrumental configuration with a very short cavity and discuss
expected benefits, most importantly the very low sensitivity to air refractive index variations and the versatility for
practical calibration purposes. We aim again for sub-nanometer measurement uncertainty and report on the status of the
experimental set-up for this short cavity FPI.
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