A new non-contact and wide-range measurement system for lens thickness based on low-coherent interferometry was proposed in this paper. In this system the reference mirror was set moveable, and high-resolution grating ruler was utilized to record real-time position of mirror. Then lens central thickness was calculated on the basis of the relative distance between two interference fringes’ peak. Compared with the traditional thickness measurement technology based on low-coherent interferometry the new method has made great progresses. Firstly beam splitting and interference were separated by use of several fiber couplers which realized appropriate intensity ratio of probe beam and reference beam, and enhanced the contrast of interference fringes. Then zoom lens was designed to improve intensity coupling efficiency between the fiber system and lens system. Finally conversion from optical signal to electronic signal was accomplished by using balance detection, which was good for improving the signal-to-noise ratio. In this paper, firstly the basic principle of measuring device was put forward, namely low-coherent interference technique. Then design of the measuring device and solution for the main problems was introduced in detail. Experimental results of device was given in the end of article, which proved that the relative error of measurement was less than 0.05%.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.