Dr. Chieh-Tang Chuang Profile

Dr. Chieh-Tang Chuang

at National Tsing Hua Univ

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Author

Publications (2)

SPIE Journal Paper | 1 July 2009

Design, fabrication, and characterization of out-of-plane W-form microsprings for vertical comb electrodes capacitive sensor

Chieh-Tang Chuang, Rongshun Chen

JM3, Vol. 8, Issue 03, 033021, (July 2009) https://doi.org/10.1117/12.10.1117/1.3184796

KEYWORDS: Sensors, Electrodes, Oxides, Reactive ion etching, Microelectromechanical systems, Silicon, Numerical simulations, Finite element methods, Photomasks, Etching

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Proceedings Article | 1 July 2005 Paper

3D capacitive tactile sensor using DRIE micromachining

Chiehtang Chuang, Rongshun Chen

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608621

KEYWORDS: Sensors, Electrodes, Deep reactive ion etching, Photomasks, Capacitance, Micromachining, Silicon, High aspect ratio silicon micromachining, Finite element methods, Microelectromechanical systems

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