Dr. Chih-Ming Lai Profile

Dr. Chih-Ming Lai

at Taiwan Semiconductor Manufacturing Co Ltd

SPIE Involvement:

Author

Publications (14)

SPIE Journal Paper | 1 October 2013 Open Access

All fiber optics circular-state swept source polarization-sensitive optical coherence tomography

Hermann Lin, Meng-Chun Kao, Chih-Ming Lai, Jyun-Cin Huang, Wen-Chuan Kuo

JBO, Vol. 19, Issue 02, 021110, (October 2013) https://doi.org/10.1117/12.10.1117/1.JBO.19.2.021110

KEYWORDS: Optical coherence tomography, Fiber optics, Polarization, Phase modulation, Calibration, Mirrors, In vivo imaging, Birefringence, Signal to noise ratio, Interferometers

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Proceedings Article | 19 March 2008 Paper

Layout patterning check for DFM

C. C. Chang, I. C. Shih, J. F. Lin, Y. S. Yen, C. M. Lai, W. C. Huang, R. G. Liu, Y. C. Ku

Proceedings Volume 6925, 69251R (2008) https://doi.org/10.1117/12.775420

KEYWORDS: Lithography, Design for manufacturing, Nanoimprint lithography, Optical lithography, Manufacturing, Design for manufacturability, Critical dimension metrology, Model-based design, Semiconducting wafers, Inspection

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Proceedings Article | 21 March 2007 Paper

Patterning effect and correlated electrical model of post-OPC MOSFET devices

Y. C. Cheng, T. H. Ou, M. H. Wu, W. L. Wang, J. H. Feng, W. C. Huang, C. M. Lai, R. G. Liu, Y. C. Ku

Proceedings Volume 6521, 65210G (2007) https://doi.org/10.1117/12.717254

KEYWORDS: Optical lithography, Instrument modeling, Data modeling, Critical dimension metrology, Transistors, Field effect transistors, Manufacturing, Design for manufacturing, Silicon, Lithography

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Proceedings Article | 13 April 2005 Paper

Correlation of collagen synthesis with polarization-sensitive optical coherence tomography imaging of in vitro human atherosclerosis

Wen-Chuan Kuo, Jeou-Jong Shyu, Nai-Kuan Chou, Chih-Ming Lai, En-Kuang Tien, Huan-Jang Huang, Chien Chou, Gwo-Jen Jan

Proceedings Volume 5690, (2005) https://doi.org/10.1117/12.590220

KEYWORDS: Collagen, Birefringence, Optical coherence tomography, Coherence imaging, In vitro testing, Image segmentation, Optical imaging, Polarization, Tissues, Foam

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Proceedings Article | 1 September 2004 Paper

MBE-grown 1.3 micron InGaAsN/GaAs double QW VCSELs with very low-threshold current density under room temperature CW operation

Chih-Ming Lai, Jyh-Shyang Wang, Ru-Shang Hsiao, Li-Chung Wei, Gray Lin, Kun-Feng Lin, Hui-Yu Liu, Alexey Kovsh, Nikolai Maleev, Daniil Livshits, Jenn-Fang Chen, Jim-Young Chi

Proceedings Volume 5452, (2004) https://doi.org/10.1117/12.545345

KEYWORDS: Nitrogen, Gallium arsenide, Quantum wells, Vertical cavity surface emitting lasers, Pulsed laser operation, Continuous wave operation, Indium, Plasma, Laser damage threshold, Annealing

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Proceedings Article | 16 June 2004 Paper

Characteristics of InGa(N)As VCSELs for fiber optic applications

Hung-Pin Yang, Chen-Ming Lu, Ru-Shang Hsiao, Chih-Hung Chiou, Cheng-Hung Lee, Chun-Yuan Huang, Hsin-Chieh Yu, Chin-May Wang, Kuen Fong Lin, Chih-Ming Lai, Li-Chung Wei, Nikolay Maleev, Alexey Kovsh, Chia-Pin Sung, Jyh-Shyang Wang, Jenn-Fang Chen, Tsin-Dong Lee, Jim Chi

Proceedings Volume 5364, (2004) https://doi.org/10.1117/12.528157

KEYWORDS: Vertical cavity surface emitting lasers, Quantum wells, Gallium arsenide, Continuous wave operation, Fiber optics, Semiconducting wafers, Metalorganic chemical vapor deposition, Nitrogen, Indium gallium arsenide

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Proceedings Article | 28 May 2004 Paper

Phenomena and OPC solution of ripple patterns for 65-nm node

Chih-Ming Lai, Jeng-Shiun Ho, Chien-Wen Lai, Cheng-Kun Tsai, Cherng-Shyan Tsay, Jeng-Horng Chen, Ru-Gun Liu, Yao Ku, Burn-Jeng Lin

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.544250

KEYWORDS: Optical proximity correction, Optical lithography, Algorithm development, Lithography, Photomasks, Critical dimension metrology

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SPIE Journal Paper | 1 October 2002

Customized illumination aperture filter design for through-pitch focus latitude enhancement of deep submicron contact hole printing

Shuo-Yen Chou, Jen-Chung Lou, Fu-Jye Liang, Tsai-Sheng Gau, Ru-Gun Liu, Chun-Kuang Chen, Chih-Ming Lai

JM3, Vol. 1, Issue 03, (October 2002) https://doi.org/10.1117/12.10.1117/1.1502261

KEYWORDS: Diffraction, Printing, Photomasks, Phase shifts, Lithographic illumination, Visualization, Monochromatic aberrations, Lithography, Optical lithography, Resolution enhancement technologies

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Proceedings Article | 6 June 2002 Paper

Plasma assisted MBE growth and characterizations of GaN

Li-Wei Tu, K. Lee, Chih-Ming Lai, Ming Hsu, Wei-Shin Chen, Chu-Shing Liu, Ikai Lo, Jenn-Kai Tsai, Pei-Chi Ho, Kuang-Yu Hsieh, Chih-Hao Huang, Yu-Ling Shen

Proceedings Volume 4641, (2002) https://doi.org/10.1117/12.469207

KEYWORDS: Gallium nitride, Scanning electron microscopy, Diffraction, Sapphire, Plasma, Luminescence, Transmission electron microscopy, Reflection, Crystals, Electron beams

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Proceedings Article | 14 September 2001 Paper

Evaluating the impact of spherical aberration on sub-0.2-um contact/via hole patterning

Shuo-Yen Chou, Jen-Chung Lou, Chih-Ming Lai, Fu-Jye Liang, Li-Jui Chen

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435668

KEYWORDS: Monochromatic aberrations, Photomasks, Lithography, Phase shifts, Lithographic illumination, Optical lithography, Critical dimension metrology, Electroluminescence, Printing, Diffraction

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Proceedings Article | 14 September 2001 Paper

Optimal positions for SB assignment and the specification of SB width variation

Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Fu-Jye Liang, Shuo-Yen Chou, Lin-Hung Shiu

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435683

KEYWORDS: Antimony, Scattering, Critical dimension metrology, Double sideband modulation, Resolution enhancement technologies, Modulation, Superposition, Light scattering, Chromium, Photoresist processing

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Proceedings Article | 24 August 2001 Paper

Novel negative photoresist process for 0.18 um dual damascene

Lin-Hung Shiu, Chih-Ming Lai, Fu-Jye Liang, Hung-Chun Chen, Li-Jui Chen, Shuo-Yen Chou

Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436891

KEYWORDS: Photoresist processing, Scanning electron microscopy, Etching, Copper, Resolution enhancement technologies, Bottom antireflective coatings, Photomasks, Photoresist materials, Phase shifts, Aluminum

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Proceedings Article | 14 May 2001 Paper

Luminescence of thin films of conjugated rigid-rod polymer PBT

Li-Wei Tu, K. Lee, Chih-Ming Lai, S. Bai, C. Wu

Proceedings Volume 4278, (2001) https://doi.org/10.1117/12.426849

KEYWORDS: Polymers, Luminescence, Electroluminescence, Absorption, Light emitting diodes, Electrodes, Aluminum, Thin films, Polymer thin films, Scanning electron microscopy

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Proceedings Article | 5 July 2000 Paper

Customized illumination aperture filter for low k1 photolithography process

Tsai-Sheng Gau, Ru-Gun Liu, Chun-Kuang Chen, Chih-Ming Lai, Fu-Jye Liang, Chin Hsia

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389016

KEYWORDS: Optical proximity correction, Diffraction, Printing, Optical lithography, Electroluminescence, Lithographic illumination, Resolution enhancement technologies, Photomasks, Scanning electron microscopy, Diffractive optical elements

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Showing 5 of 14 publications

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