Mr. Chris Stoeckel Profile

Chris Stoeckel

at Fraunhofer-Institut für Elektronische Nanosysteme ENAS

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Publications (1)

Proceedings Article | 12 March 2024 Presentation + Paper

Aluminum-nitride-based modular photonic integrated circuit technology and characterization platform (PIC-TCP)

F. Tank, J. Wecker, C. Stöckel, C. Helke, S. Schermer, A. Shaporin, K. Hiller, D. Reuter

Proceedings Volume 12889, 128890B (2024) https://doi.org/10.1117/12.3000807

KEYWORDS: Etching, Aluminum nitride, Photonic integrated circuits, Silicon, Semiconducting wafers, Waveguides, Laser resonators, Dry etching, Cladding, Wafer level optics

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