To realize the fast, high-quality alignment of off-axis reflective system, a computer-aided alignment method based on high-precision extraction of optical axis and high- precision restoration of surface shape of off-axis mirror was proposed. The optical axes of the mirrors are derived by means of a zero-position compensation detection path of the off-axis mirrors, and accuracy is better than 6", realize more rapid and accurate system initial alignment. There propose a surface shape data conversion algorithm, combined with Code V, it can realize the high-precision restoration of measured surface shape data of off-axis mirror in simulation, accurately calculate and separate the influence of shape error and position misalignment on system quality, and realize the fast and high precision alignment of off-axis reflective system. This method is applied to the practical alignment of one off-axis TMA system, wave aberration RMS≤0.084λ(λ=632.8nm) after initial alignment of the system. After only once calculation and alignment, full field RMS≤0.055λ. The experiment results demonstrate that this method is feasible.
In the field of aerospace remote sensing, the errors of optical element surface shape and position misalignment are often mixed together in the off-axis reflection system, which directly affects the accuracy of simulation analysis of computer aided alignment , and reduces the quality and efficiency of the optical system alignment. In order to solve this problem, there propose a surface shape data conversion algorithm, which can convert and process the surface shape data of optical elements. Combined with Code V, we can calculate and remove the influence of the surface shape error on the image quality of the system, and achieve optical alignment of off-axis reflection system fast with high precision. Verified analysis, the accuracy of this algorithm is higher than the traditional inversion Zernike polynomial fitting method, and reduction accuracy is better than 90%. In addition, the surface shape data conversion algorithm can also achieve restore of non-circular optical elements (such as ellipse, rectangle, shading and other arbitrary shapes) in the optical simulation software with high precision, which can provide more accurate results for optical system with high precision and rapid.
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