Dr. Cristian Landoni Profile

Dr. Cristian Landoni

Analyzers Applications at SAES Pure Gas Inc

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Publications (6)

Proceedings Article | 5 October 2016 Paper

Carbon dioxide gas purification and analytical measurement for leading edge mask and wafer cleaning

Sarah Riddle Vogt, Cristian Landoni, Chuck Applegarth, Larry Rabellino, Matt Browning, Marco Succi, Simona Pirola, Giorgio Macchi

Proceedings Volume 9985, 998523 (2016) https://doi.org/10.1117/12.2241479

KEYWORDS: Carbon dioxide, Photomasks, Medium wave, Semiconducting wafers, Liquids, Mask cleaning, Integrated circuits, Particles, Gases, Analytical research

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Proceedings Article | 10 April 2015 Paper

EUV tools: hydrogen gas purification and recovery strategies

Cristian Landoni, Marco Succi, Chuck Applegarth, Sarah Riddle Vogt

Proceedings Volume 9424, 94242O (2015) https://doi.org/10.1117/12.2085967

KEYWORDS: Hydrogen, Extreme ultraviolet, Palladium, Gases, Extreme ultraviolet lithography, Nitrogen, Scanners, Semiconductors, Argon, Contamination

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Proceedings Article | 19 March 2015 Paper

Carbon dioxide gas purification and analytical measurement for leading edge 193nm lithography

Sarah Riddle Vogt, Cristian Landoni, Chuck Applegarth, Matt Browning, Marco Succi, Simona Pirola, Giorgio Macchi

Proceedings Volume 9424, 94242N (2015) https://doi.org/10.1117/12.2085963

KEYWORDS: Carbon dioxide, Carbon monoxide, Scanners, Lithography, Oxygen, Extreme ultraviolet lithography, 193nm lithography, Immersion lithography, Nitrous oxide, Sensors

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Proceedings Article | 20 April 2011 Paper

Approaches to airborne molecular contamination assessment

Sarah Riddle Vogt, Cristian Landoni

Proceedings Volume 7971, 79712I (2011) https://doi.org/10.1117/12.881654

KEYWORDS: Contamination, Statistical analysis, Chromatography, Solid state electronics, Solid state physics, Medium wave, Environmental monitoring, Ions, Mass spectrometry, Iron

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Proceedings Article | 2 April 2010 Paper

Monitoring acidic and basic molecular contamination in leading edge lithography and metrology applications: quantitative comparison of solid state and impinger-based sampling methods

Sarah Riddle Vogt, Cristian Landoni

Proceedings Volume 7638, 763825 (2010) https://doi.org/10.1117/12.846364

KEYWORDS: Solid state physics, Solid state electronics, Sulfur, Metrology, Lithography, Contamination, Statistical analysis, Standards development, Gases, Liquids

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Showing 5 of 6 publications

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