CONFERENCE PROCEEDINGS
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Dimitry Sanko
at KLA Inc
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 24 March 2016 Paper
Improving OCD time to solution using Signal Response Metrology
Fang Fang, Xiaoxiao Zhang, Alok Vaid, Stilian Pandev, Dimitry Sanko, Vidya Ramanathan, Kartik Venkataraman, Ronny Haupt
Proceedings Volume 9778, 977806 (2016) https://doi.org/10.1117/12.2219775
KEYWORDS: Metrology, Optical metrology, Critical dimension metrology, Measurement devices, Time metrology, Lithography, Etching, Semiconducting wafers, Instrument modeling, Transistors, Model-based design, Signal processing, Scatterometry, Scanners, Data modeling, Control systems
Proceedings Article | 19 March 2015 Paper
Signal response metrology (SRM): a new approach for lithography metrology
Stilian Pandev, Fang Fang, Young Ki Kim, Jamie Tsai, Alok Vaid, Lokesh Subramany, Dimitry Sanko, Vidya Ramanathan, Ren Zhou, Kartik Venkataraman, Ronny Haupt
Proceedings Volume 9424, 94241P (2015) https://doi.org/10.1117/12.2086056
KEYWORDS: Semiconducting wafers, Metrology, Finite element methods, Critical dimension metrology, Scanners, Single crystal X-ray diffraction, Scatterometry, Model-based design, Data modeling, Lithography
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