Mr. Dongho Kim Profile

Dongho Kim

at SAMSUNG Electronics Co., Ltd.

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Hard failure prediction of ADI pattern using optical parameters and machine learning

Yeongchan Cho, Seongjeon Choi, Wonchan Lee, Hungbae Ahn, Sangoh Park, Dongho Kim, Seunghune Yang

Proceedings Volume 12953, 129530D (2024) https://doi.org/10.1117/12.3010633

KEYWORDS: Principal component analysis, Photoresist materials, Machine learning, Product development, Optical lithography, Yield improvement, Failure analysis, Design

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Proceedings Article | 1 May 2023 Presentation + Paper

A novel approach to etch-process-aware intensive layout retarget

Jeeyong Lee, Yangwoo Heo, Ryanggeun Lee, Sangwook Kim, Jisuk Hong, Kyoil Koo, Changmook Yim, Jungmin Kim, Sooyong Lee, Joonsung Kim, Dongho Kim, Seung-Hune Yang, Seongtae Jeong

Proceedings Volume 12499, 124990C (2023) https://doi.org/10.1117/12.2657880

KEYWORDS: Etching, Data modeling, Modeling, Machine learning, Design and modelling, Statistical modeling, Optical proximity correction, Reflection, Feature extraction, Artificial intelligence

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