Dr. Evgenia Kurganova Profile

Dr. Evgenia Kurganova

at ASML Netherlands BV

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Author

Publications (2)

Proceedings Article | 6 June 2023 Paper

EUV impact on silicon and carbon etching versus deposition

E. Kurganova, G. Milinkovic, I. Bolk, R. van Lent, M. van de Kerkhof

Proceedings Volume 12578, 125780E (2023) https://doi.org/10.1117/12.2665932

KEYWORDS: Silicon, Extreme ultraviolet, Carbon, Ruthenium, Extreme ultraviolet lithography, Hydrogen, Etching, Electrons, Contamination, Plasma

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Proceedings Article | 16 October 2017 Paper

Pellicle films supporting the ramp to HVM with EUV

P. J. van Zwol, M. Nasalevich, W. P. Voorthuijzen, E. Kurganova, A. Notenboom, D. Vles, M. Peter, W. Symens, A. J. M. Giesbers, J. H. Klootwijk, R. W. E. van de Kruijs, W. J. van der Zande

Proceedings Volume 10451, 104510O (2017) https://doi.org/10.1117/12.2280560

KEYWORDS: Extreme ultraviolet, Pellicles, High volume manufacturing, Infrared radiation, Manufacturing

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