Dr. Farruh Shahidi
at Siemens EDA
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 April 2023 Poster + Paper
Proceedings Volume 12494, 1249417 (2023) https://doi.org/10.1117/12.2658320
KEYWORDS: SRAF, Printing, Stochastic processes, Modeling, Semiconducting wafers, Scanning electron microscopy, Extreme ultraviolet, Design and modelling, Data modeling, Photomasks

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