Mr. Frank Bögelsack Profile

Frank Bögelsack

at EV Group

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Author

Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Maskless exposure of die annotations and image sensor patterns employing 7th generation RGB resists

K. Varga, M. Weinhart, R. Holly, T. Zenger, B. Považay, F. Bögelsack, A. Spitzer, T. Uhrmann, H. Takishita, Y. Taguchi, J. Koch, M. Schicke

Proceedings Volume 12956, 129560B (2024) https://doi.org/10.1117/12.3010156

KEYWORDS: Optical lithography, Semiconducting wafers, Distortion, RGB color model, Optical alignment, Image sensors, Semiconductors, Metals, Matrices, Sensors

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Proceedings Article | 25 May 2022 Presentation + Paper

Digitally driven maskless lithography optimized for fine pitch RDL and next generation devices

B. Matuskova Lednicka, T. Uhrmann, B. Považay, R. Holly, F. Bögelsack, T. Zenger, B. Thallner, J. Nakanishi, T. Nishimura

Proceedings Volume 12054, 120540B (2022) https://doi.org/10.1117/12.2608176

KEYWORDS: Scanning electron microscopy, Optical lithography, Electroplating, Packaging, Maskless lithography

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