Dr. Frederick H. Dill Profile

Dr. Frederick H. Dill

at HGST

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Publications (1)

Proceedings Article | 12 May 2005 Paper

The basis for lithographic modeling

Frederick Dill

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.607439

KEYWORDS: Lithography, Picture Archiving and Communication System, Image processing, Optical lithography, Photoresist materials, Process modeling, Silicon, Absorption, Photoresist developing, Transistors

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