Mr. Fumin Qiu Profile

Fumin Qiu

at Chengdu Fine Optical Engineering Research Ctr

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 27 March 2022 Paper

Junhui Die, Zhao Qiao, Fumin Qiu, Yunti Pu, Liang Lv, Bingcheng Xiong, Ping Ma, Mingxiao Zhang

Proceedings Volume 12169, 1216971 (2022) https://doi.org/10.1117/12.2624921

KEYWORDS: Etching, Tantalum, Reactive ion etching, Scanning electron microscopy, Argon, Ions, Plasma, Optoelectronic devices, Chromium, Silicon

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases