Dr. Guillaume Chabanne Profile

Dr. Guillaume Chabanne

at Soitec

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 5 March 2022 Presentation + Paper

Cutting-edge silicon-on-insulator substrate technology for datacenter transceivers and sensing applications

Corrado Sciancalepore, Q. Wilmart, L. Ecarnot, D. Herisson, G. Chabanne, B. Szelag, A. Alami-Idrissi

Proceedings Volume 12005, 1200502 (2022) https://doi.org/10.1117/12.2605732

KEYWORDS: Silicon, Silicon photonics, Semiconducting wafers, Wafer-level optics, Transceivers, Optics manufacturing, CMOS technology, Photonics, Integrated optics, Waveguides

Read Abstract +

Silicon-on-insulator (SOI) substrate technology has been the defining foundation of silicon photonics integrated circuits over the last 20+ years, fostering its commercial success in datacenter interconnects and promoting widespread adoption for high-speed optical transceiver products. More recently, novel applications could also leverage the silicon photonics toolset and ecosystem maturity to target newer, expanding markets, including consumer sensing for healthcare monitoring devices, LiDAR devices for the automotive, as well as optics-based advanced quantum computing and neural networks.

In such dynamic context, Photonics-SOI substrates design and the underlying Smart-Cut process need to relentlessly adapt in order to meet the evolving requirements of end-products and applications specifications, while addressing industrial high-volume manufacturability, high fabrication yields, cost-effectiveness, and related quality constraints. More specifically, the need for growing aggregated bandwidth density at low power dissipation in transceivers products as well as the integration of increasingly complex optical functions for sensing applications, are driving towards more stringent requirements in terms of top silicon layer within-wafer and wafer-to-wafer uniformity, atomic-scale surface roughness, low defect density and improved crystalline material quality. In this paper, the authors report on technological advances in the 300-mm Photonics-SOI process, while benchmarking these on a 300-mm silicon photonics multi-project wafer (MPW) process run. Notably, an extensive set of silicon photonics devices and circuits will be fabricated on a matrix of 220-nm-thick 2-μm-buried oxide Photonics-SOI substrates using different Smart-Cut process windows, with optical characterization data and device performance supporting the ultimate choice of substrate technology for silicon photonics process design kits on thin-SOI platforms.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years