Laser cleaning is widely used to remove surface contaminants and defects due to its low cost, high efficiency, and environmental protection. However, residual thermal stress caused by huge temperature gradient significantly induces thermal distortion and cracks. Due to the lack of understanding of the coupling interaction between laser and fused silica, it is still challenging to reveal the mechanism of thermal stress formation, severely restricting the further development of laser cleaning. In this article, we built a three-dimensional thermo-mechanical model to obtain the stress value and distribution of thermal stress and reveal the evolution mechanism of stress in different times and spaces. Moreover, laser cleaning experiments under different processing parameters were carried out to validate the simulated results, and theoretical simulations fit well with experimental results, which proves the effectiveness of the multi-physics model. This research provides new insights into thermal stress evolution, which can promote further development in laser cleaning technology.
Laser beam figuring (LBF), as a processing technology for ultra-precision figuring, is expected to be a key technology for further improving optics performance. Due to the lack of understanding of the multi-physics coupling between laser and fused silica, there is still no existing mechanism to guide nano-precision form correction, which severely restricts its further development. To acquire nanoscale high-precision figuring, accurate control of figuring depth is needed. In this paper, we found that fused silica experienced the densification process, leading to nanoscale volume shrinkage subsidence. Therefore, a mathematical model is established to reveal the mechanism of densification effect on nanoprecision figuring depth. The figuring depth of fused silica irradiated by CO2 laser is related to heat-affected zone and fictive temperature. The results indicated that the figuring depth exponentially depends on pulse duration and figuring depth levels of nanometer are obtainable with the control of pulse duration. The simulation results of CO2 LBF were finally compared with the experiment ones, which verified the feasibility of the established model. These studies could provide guidance for the optimization of parameter selection and the improvement of LBF technology.
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