CONFERENCE PROCEEDINGS
Advanced Search
Haruyasu Ohno
at Shinhokoku Material Corp
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 12 November 2024 Poster + Paper
Exceptional dimensional stability of non-ferromagnetic Invar alloy for advanced semiconductor manufacturing equipment
Proceedings Volume 13215, 132150Y (2024) https://doi.org/10.1117/12.3034312
KEYWORDS: Magnetism, Alloys, Magnetostrictive materials, Materials properties, Manganese, Iron, Temperature metrology, Chromium, Thermal stability, Tin
Proceedings Article | 26 August 2024 Presentation + Paper
Unlocking the potential of non-ferromagnetic Invar-type alloys in space exploration
Proceedings Volume 13100, 131000L (2024) https://doi.org/10.1117/12.3017918
KEYWORDS: Alloys, Magnetism, Manganese, Iron, Chromium, Materials properties, Temperature metrology, Industrial applications, Chemical elements, Thermal stability
Proceedings Article | 21 November 2023 Poster + Paper
Achievement of ultimate zero thermal expansion in super invar based alloy for stable optical systems
Proceedings Volume 12750, 127500T (2023) https://doi.org/10.1117/12.2686329
KEYWORDS: Alloys, Iron, Carbon, Thermal stability, Temperature metrology, Semiconductors, Manufacturing, Lithography, Heat treatments, Cryogenics
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top