Prof. Helen A. Tsyganok
at ITMO Univ
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 4 November 2024 Poster
Proceedings Volume 13237, (2024) https://doi.org/10.1117/12.3035479
KEYWORDS: Extreme ultraviolet lithography, Projection systems, Design, Mirror surfaces, Lithography, Structural design, Mirrors, Manufacturing, Inspection

Proceedings Article | 4 November 2024 Poster
Haoyu Wang, Shan Gao, Yujiao Li, Lyudmila Gubanova, Elena Tsyganok
Proceedings Volume 13237, (2024) https://doi.org/10.1117/12.3036153
KEYWORDS: Multilayers, Extreme ultraviolet lithography, Reflection, Reflectivity, Light sources, Analytical research, Mathematical modeling, Light sources and illumination, Film thickness, EUV optics

Proceedings Article | 29 November 2023 Poster
Proceedings Volume 12760, 1276019 (2023) https://doi.org/10.1117/12.2687575
KEYWORDS: High power lasers, Laser stabilization, Optical components, Thermography, Thermal stability, Laser systems engineering, Thermal effects, Reliability, Scientific research, Refractive index

Proceedings Article | 28 November 2023 Poster + Paper
Proceedings Volume 12765, 127651J (2023) https://doi.org/10.1117/12.2687316
KEYWORDS: Light sources and illumination, Microscopes, Design and modelling, Monochromatic aberrations, Systems modeling, Light emitting diodes, LED lighting, Diffusers

Proceedings Article | 28 November 2023 Paper
Proceedings Volume 12765, 127650F (2023) https://doi.org/10.1117/12.2686671
KEYWORDS: Mirrors, Lithographic illumination, Extreme ultraviolet lithography, Design and modelling, Light sources and illumination

Showing 5 of 21 publications
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