Commercial EUV lithography projection systems are designed with six-mirror, using high order aspherical surfaces or freeform surfaces, which require high processing and inspection requirements. When designing the initial structure of the projection system, it is important to consider the balance between the system's aberration and the difficulty of processing and manufacturing. EUV lithography optical systems minimize the number of mirrors in order to improve light energy utilization. Freeform surfaces or aspherical surfaces are used to provide more degrees of freedom for optimization. For a 6-mirror projection system, there are several ways for group design. There are 2-4, 3-3 and 4-2 combinations when divided into two groups, or into 2-2-2 triple groups. According to the design parameters of the EUV lithography projection optical system, the initial structure obtained by different group methods is analyzed. And choose more reasonable initial structure for further optimization.
Extreme ultraviolet lithography uses a light source with a wavelength of about 10nm-14 nm for illumination, and almost all known optical materials have strong absorption in this band. Therefore, the extreme ultraviolet lithography optical systems used reflective design, the reflective optical elements need to be coated with multilayers film to improve reflectivity. The choice of multilayers material and thickness of reflective optics is a key factor affecting their reflectivity in this wavelength bands. Currently, Mo/Si multilayer thin-film reflectors are used in extreme ultraviolet lithography optical systems. And in the 10nm-20nm band, Nb/Si multilayer films can also be used. In this research, the influence of factors including incident angle, operating wavelength, and film thickness on the corresponding reflectance of two multilayer reflective film structures is analyzed through mathematical modeling using Mathcad.
The significance of researching and developing thermal stabilization systems for end-pumped amplifiers in high-power lasers is evident in modern optical and laser technology. There are several key factors driving this importance. Firstly, high-power laser systems have pivotal applications across diverse fields, including science, medicine, industry, and defense. Secondly, high-power laser systems generate substantial heat, resulting in thermal effects that impact their optical stability and efficiency. Thirdly, the implementation of optical thermal stabilization systems enhances the performance and durability of high-power lasers. In summary, the research and development of optical thermal stabilization systems for end-pumped amplifiers are crucial endeavors in ensuring the stability, efficiency, and reliability of high-power laser systems.
KEYWORDS: Light sources and illumination, Microscopes, Design and modelling, Monochromatic aberrations, Systems modeling, Light emitting diodes, LED lighting, Diffusers
Illumination of the object of study is an important part of the research by optical methods. In some devices, it is necessary not only to illuminate the object of study completely, but also to achieve uniform illumination. To do this, in such optical systems as biological microscopes, an illuminating optical system of the Köhler type is used. Modern research in the field of improving the classical Koehler scheme has shown that they are aimed at improving the optical and energy characteristics, and do not take into account the dimensions of the lighting system. In some new models of microscopes, to reduce overall dimensions, only an LED with a frosted diffuser is used as an illuminating optical system, providing complete, but not uniform, illumination of the object. In this work, an illuminating optical system with reduced overall dimensions was developed. The stages of calculation of the collector and condenser of the lighting system are shown.
Illuminator is one of the important components of extreme ultraviolet lithography system. Industrial extreme ultraviolet lithography illuminator uses two compound eyes and relay system, which can realize variety of illumination modes. But the manufacture and assembly of compound eyes are difficult. Therefore, we would like to design illuminators, which use such as Offner-relay system, quad elliptical mirrors, or other mirror systems. These systems do not have more complex surfaces, easier to assembly. Analyze advantages and disadvantages of these systems, and then discuss the possibility of using these systems in industrial extreme ultraviolet lithography.
Recently, more and more attention is paid to the multichannel optical system. They are often used in microscopy. Examples include metallographic microscopy, confocal microscopy, laser scanning microscopy, optical coherence tomography, and others. Usually, one channel of such systems is lighting, and the other is observation. Such systems usually do not pay attention to the uniformity of the divided light flux. Here it is important to illuminate the object and obtain an image, and if the illumination is insufficient, the luminous flux given by the source is increased. However, if both channels of the system are used for imaging (possibly with different characteristics), the uniformity of this splitting of the optical emission is an important part. Otherwise, we risk not getting the image we need in one of the channels.
The 360 ° panoramic system is a critical component of modern vehicle safety system. However, the existing fisheye lens design generates a large amount of barrel distortion, i.e. low resolution of the edge scene. Moreover, for night driving scenarios (the operating mode in the infrared band), the current conventional systems are lack of good performance capabilities. To solve these problems, in this work, we proposed a novel car panoramic system. We analyzed the general characteristics and implementation methods of the existing panoramic imaging system. The design of the novel car panoramic system is given. We also analyzed the tolerance of the whole system and designed its mechanical structure and coating. The MTF value of the proposed car panoramic system is higher than 42% in 90lp/mm for visible part and 50% in 20lp/mm for infrared part.
Modern optical imaging systems should have high image quality in a wide spectral range from UV to IR; therefore chromatic aberrations are corrected minimum for three wavelength of waveband. Method for prediction of chromatic aberration in the spectral range of interest by known value of chromatic aberration in the other waveband is presented.
The risk of the occurrence and spread of various biological threats dictates increased requirements for the accuracy and speed of their detection. So, the work is devoted to design of the microlens with high image quality without digital processing at different environment’s temperatures. Thus, it allows investigating biological tissues in collecting place and reducing the time of diagnosis.
Optical schemes of aplanatic and afocal compensators of surface curvature and astigmatism are considered. The way of calculation of this kind of compensators and an example of using a doublet lens with an enlarged field with one of it are given.
This article is devoted to design hight-aperture optical systems, which is installed on unmanned aerial vehicles (UAV) for identification of damage to crops by adverse meteorological phenomena, detection of damage to crops by pests and diseases, monitoring of germination of grain, detection of the situation to which weeds are distributed, etc. A feature of such system is that the camera can take photographs of one area in different spectral ranges, which recognizes spectral signatures from objects and allows more detailed information in a shorter time for wide field of view with hight resolution. The searching and designing results of an optical system providing necessary characteristics are described.
This article is devoted to design hyperspectral imaging optical system, which is actively used to solve practical problems in agriculture, such as detection of damage to crops by adverse meteorological phenomena, detection of damage to crops by pests and diseases, monitoring of germination of grain, detection of the situation to which weeds are distributed, etc. These devices of optical system are installed on unmanned aerial vehicles (UAV). A feature of such system is that the camera can take photographs of one area in different spectral ranges, which recognizes spectral signatures from objects and allows more detailed information in a shorter time. This article describes the searching result and the designing process of an optical system which do above characteristics possibility.
The article is devoted to problems of design an optical system for an additive machine. The article discusses the possibility of applying different types of laser sources. It is proposed to use laser diode bars stack as a more efficient source. There are shown the results of attempts of modeling optical system in Zemax. There are shown and described the main elements of such a system. The study also considered the method is assembling a system for efficient ray tracing from laser diodes bar.
Nowadays, fast development of laser based material processing technology and additive manufacturing requires highly efficient high-power laser diode modules with a sub kW level output optical power. Such modules are also used for pumping of solid-state and fiber lasers. One option for obtaining a high-power laser beam is the spatial combination of the radiation of single laser emitters using polarization elements. The second way is manipulation of radiation from stack of laser bars. Both ways have advantages and disadvantages: in the first case, the failure of one emitter is not so crucial, but it is necessary to align a large number of optical elements with high accuracy, which also put stringent requirements to manufacturing tolerance. The second is more compact, but the solution of the thermal problem is much more difficult and bulky complex shapes optical elements emerge. In this paper, several approaches for design of optical scheme of high-power laser diode module are considered. The efficiency of optical schemes and sensitivity to misalignments are analyzed. Recommendations on the choice of schemes depending on necessary power are given.
This article presents the result of the optical design of illuminating optical system for lightship using the freeform
surface. It shows an algorithm of optical design of side-emitting lens for point source using Freeform Z function in
Zemax non-sequential mode; optimization of calculation results and testing of optical system with real diode
In complex optical systems conversion of their characteristics, such, as: a magnification, a focal distance, a field of vision etc., without entering of any changes into the circuitry of the instrument, is carried out by different application of nozzles. In view of the fact that they are, a removable part of an optical system, therefore, shan't influence provisions of input and output pupils of the instrument in general. Most often as those nozzles the calculated telescopic systems and continuous or variable increase are used separately. This operation is devoted to the analysis of the pancratique nozzles with the smooth magnification, with a possibility of their application in high-aperture systems.
The article presents the research result and the optical design of long-focus telephoto lens for photo shooting by the academician Maksutov’s scheme. It shows a review of lenses for photo shooting on the market today, and also an analysis of the correctional possibilities which is based on the scheme is presented; studied long-focus telephoto lens is compared with its closest analog, the calculation of a new telephoto lens with higher image quality is made on the basis of that comparison.
The article investigates the possibility of using diffractive optical elements on an example of the kinoform in the optical coherence tomography (OCT). The article gives a brief overview of modern methods of research in the OCT, the expediency of development hyperchromatic lenses for spectral OCT systems. The authors made the aberration analysis of diffractive optical element (DOE), conducted a review of its application, and the DOE proposed to use in the example of a kinoform as the main force component of the hyperchromatic lens. In conclusion, the article provides examples of developed hybrid lenses for two spectral ranges, lens transmittance analysis and the assessment of their adaptability.
Inter-satellite link (ISL) is a system of several satellites, which encircle the earth and spaced at a fixed distance from each other - of about 3000 kilometers. The optical-mechanical module (MOM) for the ISL is designed to transmit data over long distances in a small range of angles.
The article is devoted to problems of research and development of hyper - chromatic lenses for optical coherence tomography. The article discusses the possibility of developing hyper - chromatic lenses for a given spectral range made of glasses only. It is proposed to use the kinoform as the main power element of lens. There are shown the results of the analysis of the aberration properties of kinoform, as well as conclusions about the impossibility of its use as a single component of hyper - chromatic lens. There are shown the formulas for calculating the overall characteristics of a kinoform. The study also considered the method of calculation of hybrid lens consisting of a kinoform and lens parts. The article gives examples of hybrid lenses developed with the main characteristics and overall quality characteristics.
Improving of the autocollimating systems characteristics is a line of optical engineering development. It is associated
with study of initial errors and ways of their reduction. Study is devoted to the influence of tetrahedral reflectors
properties (errors of dihedral angles) on the characteristics (accuracy et al) of autocollimating and autoreflection opticalelectronic
systems for positioning control. The MATLAB mathematical model of tetrahedral reflector was developed for
these purposes; results of simulation were compared with Zemax simulation. It is important to notice that the process of
image formation is quite complex, it explains by superposition of six reflected and deflected beams. Because of the
dihedral angle errors six compound images separate or overlap; that causes the redistribution of energy and image
becomes complicated for processing. The aim is to study the influence of reflector properties on position of the image
energy center, because it defines the measurement error. The influence of the tetrahedral reflector properties on system's
characteristics is shown by example of shift control system based on autoreflection scheme.
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