Dr. Ho-Cheol Kim Profile

Dr. Ho-Cheol Kim

Research Staff Member at IBM Research - Almaden

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Publications (6)

Proceedings Article | 24 March 2017 Open Access

Progress in EUV lithography toward manufacturing

Seong-Sue Kim, Roman Chalykh, Hoyeon Kim, Seungkoo Lee, Changmin Park, Myungsoo Hwang, Joo-On Park, Jinhong Park, Hocheol Kim, Jinho Jeon, Insung Kim, Donggun Lee, Jihoon Na, Jungyeop Kim, Siyong Lee, Hyunwoo Kim, Seok-Woo Nam

Proceedings Volume 10143, 1014306 (2017) https://doi.org/10.1117/12.2264043

KEYWORDS: Extreme ultraviolet lithography, Manufacturing, Extreme ultraviolet, Pellicles, Photomasks, Transmittance, Logic, Scanners, Reticles, Chemical elements

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Proceedings Article | 1 April 2010 Paper

Self-assembling materials for lithographic patterning: overview, status, and moving forward

William Hinsberg, Joy Cheng, Ho-Cheol Kim, Daniel Sanders

Proceedings Volume 7637, 76370G (2010) https://doi.org/10.1117/12.852230

KEYWORDS: Lithography, Optical lithography, Etching, Silicon, Image processing, Dry etching, Gold, Photomasks, Reactive ion etching, Directed self assembly

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Proceedings Article | 21 March 2008 Paper

Integration of polymer self-assembly for lithographic application

Joy Cheng, Daniel Sanders, Ho-Cheol Kim, Linda Sundberg

Proceedings Volume 6921, 692127 (2008) https://doi.org/10.1117/12.773247

KEYWORDS: Polymers, Lithography, Optical lithography, Thin films, Polymethylmethacrylate, Process control, Nanostructures, Platinum, Gold, Directed self assembly

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Proceedings Article | 20 March 2008 Paper

Device-oriented directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid

Ho-Cheol Kim, Joy Cheng, Oun-Ho Park, Sang-Min Park, Charles Rettner

Proceedings Volume 6921, 69212B (2008) https://doi.org/10.1117/12.772723

KEYWORDS: Scanning electron microscopy, Photomicroscopy, Electron beam lithography, Picosecond phenomena, Oxides, Polymethylmethacrylate, Lithography, Ultraviolet radiation, Plasma etching, Directed self assembly

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Proceedings Article | 20 March 2008 Paper

Rapid directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid

Ho-Cheol Kim, Joy Cheng, Oun-Ho Park, Sang-Min Park, Ricardo Ruiz, Charles Black, Jed Pitera, Charles Rettner, Myron Flickner

Proceedings Volume 6921, 692129 (2008) https://doi.org/10.1117/12.772684

KEYWORDS: Photomicroscopy, Scanning electron microscopy, Silicon, Plasma etching, Picosecond phenomena, Coating, Oxides, Chromium, Lithography, Directed self assembly

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Proceedings Article | 21 March 2007 Paper

Self-aligned, self-assembled organosilicate line patterns of ~20nm half-pitch from block-copolymer mediated self assembly

Ho-Cheol Kim, Joy Cheng, Charles Rettner, Oun-Ho Park, Robert Miller, Mark Hart, Linnea Sundström, Ying Zhang

Proceedings Volume 6519, 65191H (2007) https://doi.org/10.1117/12.711687

KEYWORDS: Silicon, Phase modulation, Scanning electron microscopy, Plasma etching, Natural surfaces, Transmission electron microscopy, Oxides, Etching, Thin films, Electron beam lithography

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Showing 5 of 6 publications

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