Silicon photonics using waveguide- and microresonator-based devices are finding technologically important applications
in the field of optofluidics. By integrating microfluidic channels on top of silicon-based planar devices, silicon photonic
devices can function as on-chip optical tweezers to manipulate micro/nanoparticles. In this paper, we will highlight our
recent progress in the field of optofluidics using silicon nitride devices for on-chip optical manipulation including the
experimental demonstrations of: (i) planar optical tweezers using waveguide junctions with and without tapers, (ii)
microparticle buffering and dropping on microring resonator devices upon linearly polarized light and (iii) microparticle
trapping and assembling on circular microdisk resonators. Such devices can function as basic building blocks for
“optical tweezers circuits” in lab-on-chip applications.
We will discuss the latest progress in our work on using complementary metal-oxide semiconductor (CMOS) photonics
for optical manipulation of dielectric microparticles and submicrometer particles in a microfluidic channel. Specifically,
we will review optical trapping and routing of particles using silicon nitride waveguide-based directional couplers and
multimode-interference (MMI)-based couplers. Our experiments reveal that microparticles can be directionally coupled
from one waveguide to another waveguide via evanescent light coupling over submicrometer gap spacing. We also
observe that microparticles can be preferentially transported to the larger field-intensity output-port of a 1×2 MMI
optical power splitter. We thus envision that these photonic components, along with other photonic components that
have previously been demonstrated with functionalities of optical manipulation of particles in fluids, constitute basic
building blocks of CMOS optofluidic "particle circuits" for particle manipulation and biosensing.
Silicon photonics using microdisk and microring resonators are finding technologically important applications from
telecommunications and on-chip optical interconnects to optofluidics and biosensing. Silicon-based microresonators that
partially confine light by total internal reflection are versatile device structures which are highly wavelength-selective,
reconfigurable via various refractive index tuning mechanisms, micrometer-scale footprint, and readily in/out-coupled
with integrated waveguides. In this paper, we will highlight our latest progress in silicon photonics using microdisk and
microring resonators for on-chip optical interconnects, optofluidics and biosensing applications including the
experimental demonstrations of: (i) optical time delay and advance using silicon microring resonators integrated with pi-
n diodes; (ii) photocurrent spectroscopy of microdisk resonators using two-photon-absorption induced photocarriers;
(iii) optical trapping and transporting of microparticles using a water-clad silicon nitride microring resonator; and (iv)
coupled microdisk resonator optical waveguide-based refractive index sensors.
We review our recent work on silicon photonic devices for on-chip optical interconnects and optofluidics. On the optical
interconnects front, we demonstrate coupled-resonator optical waveguides with gapless inter-cavity coupling for on-chip
wide-bandwidth high-order optical channel filters and optical delay lines. We propose a 5×5 matrix switch comprising
two-dimensionally cascaded microring resonator-based electrooptic switches for network-on-chip applications and
demonstrate a 2×2 matrix switch as a proof-of-concept. We demonstrate cavity-enhanced photocurrent generation in a
p-i-n diode embedded microring resonator for wavelength-selective photodetection and monitoring on-chip optical
networks. We also investigate a serial-cascaded double-microring-based silicon photonic circuit for high-speed on-chip
clock-recovery applications. On the optofluidics front, we study silicon nitride based waveguides with integrated
microfluidic channels for optical manipulation of microparticles.
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