Mr. Igor Zagoranskiy Profile

Igor Zagoranskiy

at Leibniz-Institut für Oberflächenmodifizierung eV

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Publications (3)

Proceedings Article | 4 March 2019 Presentation + Paper

Laser-induced large area sub-µm and nanostructuring of dielectric surfaces and thin metal layer

P. Lorenz, I. Zagoranskiy, M. Ehrhardt, K. Zimmer

Proceedings Volume 10906, 109060T (2019) https://doi.org/10.1117/12.2510206

KEYWORDS: Metals, Chromium, Silica, Nanostructuring, Dielectrics, Etching, Dewetting, Scanning electron microscopy, Atomic force microscopy, Liquids

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Proceedings Article | 19 February 2018 Paper

Nano- and micro-structuring of fused silica using time-delay adjustable double flash ns-laser radiation

Pierre Lorenz, Xiongtao Zhao, Martin Ehrhardt, Igor Zagoranskiy, Klaus Zimmer, Bing Han

Proceedings Volume 10520, 105201K (2018) https://doi.org/10.1117/12.2288294

KEYWORDS: Pulsed laser operation, Silica, Metals, Etching, Molybdenum, Dielectrics, Liquids, Nanostructuring, Plasma, Chromium

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Large area, high speed, nanopatterning of surfaces by laser ablation is challenging due to the required high accuracy of the optical and mechanical systems fulfilling the precision of nanopatterning process. Utilization of self-organization approaches can provide an alternative decoupling spot precision and field of machining. The laser-induced front side etching (LIFE) and laser-induced back side dry etching (LIBDE) of fused silica were studied using single and double flash nanosecond laser pulses with a wavelength of 532 nm where the time delay ∆τ of the double flash laser pulses was adjusted from ∼50 ns to ∼10 μs. The fused silica can be etched at both processes assisted by a 10 nm chromium layer where the etching depth ∆z at single flash laser pulses is linear to the laser fluence and independent on the number of laser pulses, from 2 to 12 J/cm², it is ∆z = δ_LIFE/LIBDE ⋅ Φ with δ_LIFE ∼ 16 nm/(J/cm²) and δ_LIBDE ∼ 5.2 nm/(J/cm²) ∼ 3 ⋅ δ_LIFE. At double flash laser pulses, the ∆z is dependent on the time delay ∆τ of the laser pulses and the ∆z slightly increased at decreasing ∆τ. Furthermore, the surface nanostructuring of fused silica using IPSM-LIFE (LIFE using in-situ pre-structured metal layer) method with a single double flash laser pulse was tested. The first pulse of the double flash results in a melting of the metal layer. The surface tension of the liquid metal layer tends in a droplet formation process and dewetting process, respectively. If the liquid phase life time ∆t_LF is smaller than the droplet formation time the metal can be "frozen" in an intermediated state like metal bare structures. The second laser treatment results in a evaporation of the metal and in a partial evaporation and melting of the fused silica surface, where the resultant structures in the fused silica surface are dependent on the lateral geometry of the pre-structured metal layer. A successful IPSM-LIFE structuring could be achieved assisted by a 20 nm molybdenum layer at ∆τ ≥ 174 ns. That path the way for the high speed ultra-fast nanostructuring of dielectric surfaces by self-organizing processes. The different surface structures were analyzed by scanning electron microscopy (SEM) and white light interferometry (WLI).

Proceedings Article | 17 February 2017 Paper

Nanostructuring of sapphire using time-modulated nanosecond laser pulses

P. Lorenz, I. Zagoranskiy, M. Ehrhardt, L. Bayer, K. Zimmer

Proceedings Volume 10092, 100921P (2017) https://doi.org/10.1117/12.2251826

KEYWORDS: Molybdenum, Liquids, Aluminum, Dewetting, Dielectrics, Metals, Nanostructuring, Sapphire, Laser processing, Scanning electron microscopy, Modulation, Pulsed laser operation, Sapphire lasers, Etching

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