Mr. Jae Hyoung Kim Profile

Jae Hyoung Kim

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation

Process incoming control for advanced EUV overlay strategy enabling mass production of GAA nanosheet

SungWoon Uh, Dong-Min Kim, Dooho Park, Jae Hyoung Kim, Sangil Son, Insung kim

Proceedings Volume PC12953, PC129530N (2024) https://doi.org/10.1117/12.3010035

KEYWORDS: Extreme ultraviolet, Semiconducting wafers, Overlay metrology, Optical alignment, Logic, Process control, Modeling, Mathematical optimization

Read Abstract +

Proceedings Article | 10 April 2024 Presentation + Paper

Improving EUV sub-40nm via single patterning using wavefront and pupil co-optimization

Soojung Kim, No Young Chung, Kwangseok Maeng, Hyunjae Cho, Jerry Lim, Hyungrok Jang, Jae Hyoung Kim, Insung Kim, Eelco van Setten, Hidde Keizers, Ajinkya Patil, Steven Beekmans, Jungtae Lee, Ki-Seok Kim, James Lee, Sung-Woon Park, Jialei Tang, Stephen Hsu, Youping Zhang, Paul Derks

Proceedings Volume 12953, 1295306 (2024) https://doi.org/10.1117/12.3009878

KEYWORDS: Wavefronts, Extreme ultraviolet, Extreme ultraviolet lithography, Light sources and illumination, Stochastic processes, Diffraction, Optical lithography, Source mask optimization, Projection systems

Read Abstract +

Proceedings Article | 10 April 2024 Poster + Paper

Diffraction-based metrology for dose monitoring and control

Young Sung Kim, JongHyun Lee, SangHyun Lee, Kwangseok Maeng, JaeHyoung Kim, InSung Kim, SungWoon Uh, Eric Janda, Ajinkya Patil, SuYeun Baek, SeongYong Cho, James Lee

Proceedings Volume 12955, 129553E (2024) https://doi.org/10.1117/12.3010991

KEYWORDS: Semiconducting wafers, Metrology, Critical dimension metrology, Diffraction, Scanners, Dose control, Design, Wafer level optics, Optical sensing, Diffraction gratings

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years