Javaneh Boroumand Azad
at Univ of Central Florida
Publications (6)

Proceedings Article | 24 June 2014 Paper
Proceedings Volume 9070, 90701U (2014) https://doi.org/10.1117/12.2052355
KEYWORDS: Microelectromechanical systems, Oxides, Finite element methods, Metals, Infrared sensors, Micromirrors, Infrared detectors, Infrared radiation, Actuators, Scanning electron microscopy

Proceedings Article | 24 June 2014 Paper
Proceedings Volume 9070, 907020 (2014) https://doi.org/10.1117/12.2052338
KEYWORDS: Finite element methods, Microelectromechanical systems, Metals, Switching, Thermography, Sensors, Aluminum, Oxides, Infrared detectors, Infrared radiation

Proceedings Article | 18 June 2013 Paper
Proceedings Volume 8704, 87043B (2013) https://doi.org/10.1117/12.2018102
KEYWORDS: Microelectromechanical systems, Metals, Oxides, Sensors, Technetium, Gold, Time metrology, Signal to noise ratio, Convection, Silica

Proceedings Article | 6 June 2013 Paper
Proceedings Volume 8708, 870817 (2013) https://doi.org/10.1117/12.2018082
KEYWORDS: Gold, Infrared radiation, Photomasks, Polymers, Optical lithography, Reflectivity, Metals, Infrared bolometers, Bolometers, Scanning electron microscopy

Proceedings Article | 29 March 2013 Paper
Proceedings Volume 8682, 868226 (2013) https://doi.org/10.1117/12.2018628
KEYWORDS: Etching, Dry etching, Microelectromechanical systems, Plasma etching, Plasma, Oxygen, Ultraviolet radiation, Oxides, Reactive ion etching, Ions

Showing 5 of 6 publications
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