Dr. Ji Hoon Na Profile

Dr. Ji Hoon Na

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (24)

Proceedings Article | 16 October 2017 Presentation

EUV mask readiness for HVM (Conference Presentation)

Heebom Kim, Chang Young Jeong, Donggun Lee, Ji Hoon Na, Hwan-Seok Seo, Mun Ja Kim, Sung-Won Kwon, Chan-Uk Jeon

Proceedings Volume 10451, 104510I (2017) https://doi.org/10.1117/12.2280687

KEYWORDS: Extreme ultraviolet, Photomasks, Pellicles, Inspection, Extreme ultraviolet lithography, High volume manufacturing, Scanners, Transmittance

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Proceedings Article | 28 March 2017 Presentation + Paper

Application of actinic mask review system for the preparation of HVM EUV lithography with defect free mask

Jihoon Na, Donggun Lee, Changhwan Do, Hong-seok Sim, Jung-Hwan Lee, Jungyoup Kim, Hwan-Seok Seo, Heebom Kim, Chan Uk Jeon

Proceedings Volume 10145, 101450M (2017) https://doi.org/10.1117/12.2257390

KEYWORDS: Photomasks, Extreme ultraviolet, Imaging systems, Extreme ultraviolet lithography, Airborne remote sensing, Inspection, Line width roughness, High volume manufacturing, Lead, Metrology, Semiconducting wafers, Scanning electron microscopy, SRAF, Binary data, EUV optics, Mirrors

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Proceedings Article | 24 March 2017 Open Access

Progress in EUV lithography toward manufacturing

Seong-Sue Kim, Roman Chalykh, Hoyeon Kim, Seungkoo Lee, Changmin Park, Myungsoo Hwang, Joo-On Park, Jinhong Park, Hocheol Kim, Jinho Jeon, Insung Kim, Donggun Lee, Jihoon Na, Jungyeop Kim, Siyong Lee, Hyunwoo Kim, Seok-Woo Nam

Proceedings Volume 10143, 1014306 (2017) https://doi.org/10.1117/12.2264043

KEYWORDS: Extreme ultraviolet lithography, Manufacturing, Extreme ultraviolet, Pellicles, Photomasks, Transmittance, Logic, Scanners, Reticles, Chemical elements

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Proceedings Article | 18 March 2016 Paper

Study of nanometer-thick graphite film for high-power EUVL pellicle

Mun Ja Kim, Hwan Chul Jeon, Roman Chalykh, Eokbong Kim, Jihoon Na, Byung-Gook Kim, Heebom Kim, Chanuk Jeon, Seul-Gi Kim, Dong-Wook Shin, Taesung Kim, Sooyoung Kim, Jung Hun Lee, Ji-Beom Yoo

Proceedings Volume 9776, 97761Z (2016) https://doi.org/10.1117/12.2218228

KEYWORDS: Extreme ultraviolet lithography, Pellicles, Silicon, Extreme ultraviolet, Graphene, Crystals, Transmittance, Silicon films, Thin films, Lithography, Hydrogen, Infrared lasers, Thermography

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Proceedings Article | 28 June 2013 Paper

Extending DUV mask inspection tool for inspecting 2xnm HP and beyond

Jihoon Na, Sang Hoon Han, Gisung Yoon, Dong Hoon Chung, Byung-Gook Kim, Chanuk Jeon, Dana Bernstein, Lior Shoval, Ido Dolev, Ofer Shopen, Ju Sang Lee, Chung ki Lyu, Seung Ryong Bae

Proceedings Volume 8701, 870115 (2013) https://doi.org/10.1117/12.2032774

KEYWORDS: Photomasks, Inspection, Printing, Deep ultraviolet, Signal to noise ratio, Defect detection, Semiconducting wafers, Optical inspection, Wafer-level optics, Geometrical optics

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Proceedings Article | 8 November 2012 Paper

EUV mask inspection study for sub-20nm device

Inkyun Shin, Gisung Yoon, Ji Hoon Na, Paul D. Chung, Chan-Uk Jeon

Proceedings Volume 8522, 85220M (2012) https://doi.org/10.1117/12.964964

KEYWORDS: Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Polarization, Printing, Modulation, Lithographic illumination, Scanning electron microscopy

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Proceedings Article | 23 March 2012 Paper

Printability and inspectability of defects on EUV blank for 2xnm hp HVM application

Sungmin Huh, In-Yong Kang, Chang Young Jeong, Jihoon Na, Dong Ryul Lee, Hwan-seok Seo, Seong-Sue Kim, Chan-Uk Jeon, Jonggul Doh, Gregg Inderhees, Jinho Ahn

Proceedings Volume 8322, 83220K (2012) https://doi.org/10.1117/12.916021

KEYWORDS: Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Bismuth, Defect inspection, High volume manufacturing, Defect detection, Semiconductors

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Proceedings Article | 23 March 2012 Paper

Printability study of pattern defects in the EUV mask as a function of hp nodes

Tae-Geun Kim, Hwan-Seok Seo, In-Yong Kang, Chang Young Jeong, Sungmin Huh, Jihoon Na, Seong-Sue Kim, Chan-Uk Jeon, Iacopo Mochi, Kenneth Goldberg

Proceedings Volume 8322, 83220A (2012) https://doi.org/10.1117/12.916052

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Extreme ultraviolet lithography, Extreme ultraviolet, Scanning electron microscopy, Scanners, Lithography, Photoresist processing, Semiconductors

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Proceedings Article | 14 October 2011 Paper

EUVL mask inspection using 193nm wavelength for 30nm node and beyond

Jihoon Na, Wonil Cho, Tae-Geun Kim, In-Yong Kang, Byungcheol Cha, Inkyun Shin, Han-Ku Cho

Proceedings Volume 8166, 81661H (2011) https://doi.org/10.1117/12.898896

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Extreme ultraviolet lithography, Modulation, Defect detection, Scanning electron microscopy, Scanners, Reflectivity, Wafer-level optics

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Proceedings Article | 2 April 2011 Paper

Current status of EUV mask inspection using 193nm optical inspection system in 30nm node and beyond

Sang Hoon Han, Jihoon Na, Wonil Cho, Dong Hoon Chung, Chan-Uk Jeon, HanKu Cho, Dana Bernstein, Eun Young Park, Anoop Sreenath, Shmoolik Mangan

Proceedings Volume 7985, 79850V (2011) https://doi.org/10.1117/12.895209

KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Extreme ultraviolet lithography, Signal to noise ratio, Optical inspection, Lithography, Scanners, Manufacturing, Semiconducting wafers

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Proceedings Article | 24 February 2010 Paper

Common-path optical frequency domain imaging system designed for identifying and grading pearls

Myeong Jin Ju, Seon Young Ryu, Jihoon Na, Hae Young Choi, Hae Yeon Kim, Byeong Ha Lee

Proceedings Volume 7556, 755613 (2010) https://doi.org/10.1117/12.841220

KEYWORDS: Optical coherence tomography, Imaging systems, Light sources, Optical fibers, Inspection, Single mode fibers, Data acquisition, Signal detection, Optical imaging, Image resolution

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Proceedings Article | 4 March 2009 Paper

Thickness and index measurements of a transparent specimen by full-field optical coherence microscopy

Jihoon Na, Woo June Choi, Hae Young Choi, Seon Young Ryu, Eun Seo Choi, Byeong Ha Lee

Proceedings Volume 7184, 71841B (2009) https://doi.org/10.1117/12.808971

KEYWORDS: Refractive index, Epoxies, Glasses, Optical coherence tomography, Imaging systems, 3D image processing, Mirrors, Ferroelectric materials, Optical coherence microscopy, CCD cameras

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Proceedings Article | 23 February 2009 Paper

Stroboscopic wide-field optical coherence gated imaging

Woo June Choi, Jihoon Na, Jonghyun Eom, Byeong Ha Lee

Proceedings Volume 7169, 71691L (2009) https://doi.org/10.1117/12.808917

KEYWORDS: Optical coherence tomography, Charge-coupled devices, Imaging systems, Signal detection, 3D image processing, Interferometers, 3D scanning, Mirrors, Doppler effect, 3D acquisition

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Proceedings Article | 20 February 2009 Paper

Simultaneous measurements of optical coherence tomography and fluorescence spectroscopy based on double clad fiber

Seon Young Ryu, Hae Young Choi, Jihoon Na, Eun Seo Choi, Byeong Ha Lee

Proceedings Volume 7171, 71710T (2009) https://doi.org/10.1117/12.808915

KEYWORDS: Optical coherence tomography, Cladding, Luminescence, Fluorescence spectroscopy, Tissues, Single mode fibers, Signal detection, Optical testing, Fiber optics, Imaging systems

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Proceedings Article | 20 February 2009 Paper

Single-body lensed fiber probe actuated by magnetic force for spectral domain optical coherence tomography

Eun Jung Min, Jihoon Na, Seon Young Ryu, Byeong Ha Lee

Proceedings Volume 7168, 71682I (2009) https://doi.org/10.1117/12.808961

KEYWORDS: Optical coherence tomography, Magnetism, Actuators, Magnesium, Photography, Single mode fibers, Optical alignment, Mirrors, Imaging systems, Ferromagnetics

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Proceedings Article | 18 February 2008 Paper

All-fiber probe for optical coherence tomography

Seon Young Ryu, Hae Young Choi, Jihoon Na, Woo June Choi, Byeong Ha Lee

Proceedings Volume 6847, 68472L (2008) https://doi.org/10.1117/12.766316

KEYWORDS: Optical coherence tomography, Single mode fibers, Imaging systems, Skin, Image resolution, Optical fibers, Objectives, Optical imaging, Fusion splicing, Distance measurement

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Proceedings Article | 18 February 2008 Paper

Dispersion-assisted measurement of the refractive index and thickness by hybrid interferometer

Seokhan Kim, Jihoon Na, Myoung Jin Kim, Byeong Ha Lee

Proceedings Volume 6847, 68470X (2008) https://doi.org/10.1117/12.761625

KEYWORDS: Refractive index, Glasses, Objectives, Silica, Light sources, Interferometers, Phase measurement, Calibration, Confocal optics, Mirrors

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Proceedings Article | 18 February 2008 Paper

Side-imaging lensed photonic crystal fiber probe

Hae Young Choi, Seon Young Ryu, Jihoon Na, Byeong Ha Lee, Ik-Bu Sohn, Young-Chul Noh, Jongmin Lee

Proceedings Volume 6847, 68472F (2008) https://doi.org/10.1117/12.766349

KEYWORDS: Optical fibers, Optical coherence tomography, Polishing, Photonic crystal fibers, Imaging systems, Near field optics, Surface finishing, Mirrors, Optical imaging, Free space optics

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Proceedings Article | 7 February 2007 Paper

Full-field optical coherence tomography image restoration based on Hilbert transformation

Jihoon Na, Woo June Choi, Eun Seo Choi, Seon Young Ryu, Byeong Ha Lee

Proceedings Volume 6429, 64292U (2007) https://doi.org/10.1117/12.702266

KEYWORDS: Optical coherence tomography, Mirrors, Image restoration, Light sources, Imaging systems, 3D image processing, Tungsten, CCD cameras, Image processing, Objectives

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Proceedings Article | 20 February 2006 Paper

Realization of fiber-based OCT system with broadband photonic crystal fiber coupler

Seon Young Ryu, Jihoon Na, Hae Young Choi, Woo Jun Choi, Byeong Ha Lee, Gil-Ho Yang

Proceedings Volume 6079, 60791N (2006) https://doi.org/10.1117/12.648951

KEYWORDS: Optical coherence tomography, Sapphire lasers, Imaging systems, Single mode fibers, Light sources, Photonic crystal fibers, Skin, Eye, Teeth, In vitro testing

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Proceedings Article | 15 February 2006 Paper

Assessment of dental-caries using optical coherence tomography

Jihoon Na, Jae Ho Baek, Eun Seo Choi, Seon Young Ryu, Ju-wan Chang, Chang Su Lee, Byeong Ha Lee

Proceedings Volume 6137, 613703 (2006) https://doi.org/10.1117/12.645747

KEYWORDS: Dental caries, Optical coherence tomography, Teeth, Radiography, Calcium, Tissues, Diagnostics, Chemical analysis, Image resolution, Signal detection

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Proceedings Article | 13 April 2005 Paper

Application of iterative deconvolution methods for optical coherent imaging

Stephane Paes, Seon Young Ryu, Jihoon Na, Eun Seo Choi, Byeong Ha Lee

Proceedings Volume 5690, (2005) https://doi.org/10.1117/12.592876

KEYWORDS: Optical coherence tomography, Speckle, Digital filtering, Deconvolution, Image filtering, Image resolution, Mirrors, Convolution, Image enhancement, Copper

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Proceedings Article | 13 April 2005 Paper

Fiber-based optical delay line for OCT system

Eun Seo Choi, Jihoon Na, Seon Young Ryu, Byeong Ha Lee

Proceedings Volume 5690, (2005) https://doi.org/10.1117/12.592678

KEYWORDS: Optical coherence tomography, Mirrors, Glasses, Biomedical optics, Dispersion, Ferroelectric materials, Fiber Bragg gratings, Image resolution, Real time imaging, Reflectivity

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Proceedings Article | 1 July 2004 Paper

Fiber-based high-resolution OCT system with halogen light source

EunSeo Choi, Jihoon Na, Byeong Ha Lee

Proceedings Volume 5316, (2004) https://doi.org/10.1117/12.531317

KEYWORDS: Optical coherence tomography, Light sources, Halogens, Single mode fibers, Lamps, Objectives, Fiber optics, Fiber couplers, Optical components, Thin films

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Showing 5 of 24 publications

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